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Balvin, Manuel A.

Publications and source records attributed to Balvin, Manuel A..

Development of Large-Scale Magnetic Calorimeter Arrays

We describe performance of large-scale arrays of metallic magnetic calorimeters (MMCs) we are developing to meet requirements of the Lynx X-ray Microcalorimeter (LXM) instrument in the astrophysics mission concept Lynx. We have fabricated prototypes with 55,800 x-ray pixels thermally connected to 5,688 MMC sensors. Subarrays demonstrate three types of pixels, which have different energy and spatial resolution goals in LXM. Pixel pitch is 50 or 25 µm. For two subarrays, use of position sensitive detectors, in a "hydra" configuration with 25 x-ray absorbers per sensor, helps achieve a large focal plane by increasing pixel count relative to readout channels. Since each absorber has a different thermal link to its sensor, it generates a different pulse shape and enables discrimination of pixel position. Superconducting wiring from all sensors was brought out to the perimeter of the overall array using multiple buried metal layers planarized by Chemical Mechanical Planarization to achieve high critical current, low inductance, and high fabrication yield. An automated, algorithmic approach was used to layout the complex wiring pattern. For readout with existing small arrays of Superconducting Quantum Interference (SQUID) amplifiers, 112 selected pixels were connected to wire bond pads. In hydras, we successfully identified 25 pulse shapes using rise-time and pulse height. Pulse shapes were similar to simulations. We measured noise and responsivity to substrate temperature and applied x-ray pulses. While we designed sensors to have high inductance to relative to stray inductance of wiring, we had only mismatched (lower input inductance) SQUIDs available in our current apparatus, giving non-optimized resolution. We compared measured and calculated energy resolutions. We have the required sensitivity to reach < 3 eV FWHM resolution for 6 keV x-rays, required for the LXM Main Array, and the ability to discriminate the 25 different absorber pixels down to energies < 300 eV.

microcalorimeters↗

Prototype Magnetic Calorimeter Arrays with Buried Wiring for the Lynx X-Ray Microcalorimeter

Metallic magnetic calorimeter (MMC) technology is a leading contender for detectors for the Lynx X-ray Microcalorimeter, which is an imaging spectrometer consisting of an array of greater than 100,000 pixels. The fabrication of such large arrays presents a challenge when attempting to route the superconducting wiring from the pixels to the multiplexed readout. If the wiring is designed to be planar, then an aggressive, submicron scale wiring pitch has to be employed, which is technically challenging to design and fabricate on account of the requirements of low inductance, low cross-talk, high critical currents and high yield. An alternative way to achieve large scale, high density wiring is through the use of multiple buried metal layers, planarized by Chemical Mechanical Planarization. This approach is well-suited for connecting thousands of pixels on a large focal plane to readout chips, and also for fabricating sensor meander coils with narrow line widths, which helps in increasing the sensor inductance and thus alleviates stray inductance issues associated with the wiring in large size arrays. In this work we describe the fabrication of high sensor inductance MMC arrays implementing Lynx concepts and incorporating multiple layers of buried Nb wiring. The detector array is composed of three sub-arrays with pixels optimized to meet the different science driven performance requirements of Lynx. In two of the sub-arrays we adopt a thermal multiplexing scheme to read out pixels by coupling 25 absorbers to a single sensor through thermal links of varied thermal conductance. We demonstrate the successful fabrication of multi-absorber MMCs with fine pitch pixels in very large size arrays.

Solid-State Physics↗

Future Planetary Instrument Capabilities Made Possible by Micro- and Nanotechnology

A number of new instrument capabilities are currently in maturation for future in situ use on planetary science missions. Moving beyond the impressive in situ instrumentation already operating in planetary environments beyond Earth will enable the next step in scientific discovery. The approach for developing beyond current instrumentation requires a careful assessment of science-driven capability advancement. To this end, two examples of instrument technology development efforts that are leading to new and important analytical capabilities for in situ planetary science will be discussed: (1) an instrument prototype enabling the interface between liquid separation techniques and laser desorption/ionization mass spectrometry and (2) an addressable excitation source enabling miniaturized electron probe microanalysis for elemental mapping of light and heavy elements.

Getty, Stephanie A.↗

Magnetic Calorimeter Option for the Lynx X-Ray Microcalorimeter

One option for the detector technology to implement the Lynx x-ray microcalorimeter (LXM) focal plane arrays is the metallic magnetic calorimeter (MMC). Two-dimensional imaging arrays of MMCs measure the energy of x-ray photons by using a paramagnetic sensor to detect the temperature rise in a microfabricated x-ray absorber. While small arrays of MMCs have previously been demonstrated that have energy resolution better than the 3 eV requirement for LXM, we describe LXM prototype MMC arrays that have 55,800 x-ray pixels, thermally linked to 5688 sensors in “hydra” configurations, and that have sensor inductance increased to avoid signal loss from the stray inductance in the large-scale arrays when the detectors are read out with microwave superconducting quantum interference device multiplexers, and that use multilevel planarized superconducting wiring to provide low-inductance, low-crosstalk connections to each pixel. We describe the features of recently tested MMC prototype devices and simulations of expected performance in designs opti- mized for the three subarray types in LXM.

Stevenson, Thomas R.↗

Integrated Circuit (IC) Chip with a Self-Contained Fluid Sensor and Method of Making the Chip

An integrated circuit (IC) chip with a self-contained fluid sensor and method of making the chip. The sensor is in a conduit formed between a semiconductor substrate and a non-conductive cap with fluid entry and exit points through the cap. The conduit may be entirely in the cap, in the substrate or in both. The conduit includes encased temperature sensors at both ends and a central encased heater. The temperature sensors may each include multiple encased diodes and the heater may include multiple encased resistors.

Manos, George↗

Method of Fabricating X-Ray Absorbers for Low-Energy X-Ray Spectroscopy

A method of forming low-energy x-ray absorbers. Sensors may be formed on a semiconductor, e.g., silicon, wafer. A seed metal layer, e.g., gold, is deposited on the wafer and patterned into stem pads for electroplating. Stems, e.g., gold, are electroplated from the stem seed pads through a stem mask. An absorber layer, e.g., gold, is deposited on the wafer, preferably e-beam evaporated. After patterning the absorbers, absorber and stem mask material is removed, e.g., in a solvent bath and critical point drying.

Stevenson, Thomas R.↗

Athermal Energy Loss from X-rays Deposited in Thin Superconducting Films on Solid Substrates

When energy is deposited in a thin-film cryogenic detector, such as from the absorption of an X-ray, an important feature that determines the energy resolution is the amount of athermal energy that can be lost to the heat bath prior to the elementary excitation systems coming into thermal equilibrium. This form of energy loss will be position-dependent and therefore can limit the detector energy resolution. An understanding of the physical processes that occur when elementary excitations are generated in metal films on dielectric substrates is important for the design and optimization of a number of different types of low temperature detector. We have measured the total energy loss in one relatively simple geometry that allows us to study these processes and compare measurements with calculation based upon a model for the various di.erent processes. We have modeled the athermal phonon energy loss in this device by finding an evolving phonon distribution function that solves the system of kinetic equations for the interacting system of electrons and phonons. Using measurements of device parameters such as the Debye energy and the thermal di.usivity we have calculated the expected energy loss from this detector geometry, and also the position-dependent variation of this loss. We have also calculated the predicted impact on measured spectral line-shapes, and shown that they agree well with measurements. In addition, we have tested this model by using it to predict the performance of a number of other types of detector with di.erent geometries, where good agreement is also found.

Kozorezov, Alexander G.↗