Baron, Richard | Search NASA

NASA NTRS2009

High-Throughput Top-Down and Bottom-Up Processes for Forming Single-Nanotube Based Architectures for 3D Electronics

We have developed manufacturable approaches to form single, vertically aligned carbon nanotubes, where the tubes are centered precisely, and placed within a few hundred nm of 1-1.5 micron deep trenches. These wafer-scale approaches were enabled by chemically amplified resists and inductively coupled Cryo-etchers for forming the 3D nanoscale architectures. The tube growth was performed using dc plasma-enhanced chemical vapor deposition (PECVD), and the materials used for the pre-fabricated 3D architectures were chemically and structurally compatible with the high temperature (700 C) PECVD synthesis of our tubes, in an ammonia and acetylene ambient. Tube characteristics were also engineered to some extent, by adjusting growth parameters, such as Ni catalyst thickness, pressure and plasma power during growth. Such scalable, high throughput top-down fabrication techniques, combined with bottom-up tube synthesis, should accelerate the development of PECVD tubes for applications such as interconnects, nano-electromechanical (NEMS), sensors or 3D electronics in general.

plasma-enhanced chemical vapor deposition (PECVD),↗

NASA NTRS2008

Transmissive Diffractive Optical Element Solar Concentrators

Solar-thermal-radiation concentrators in the form of transmissive diffractive optical elements (DOEs) have been proposed as alternatives to mirror-type solar concentrators now in use. In comparison with functionally equivalent mirror-type solar concentrators, the transmissive, diffractive solar concentrators would weigh and cost less, and would be subject to relaxed mechanical tolerances. A DOE concentrator would be made from a thin, flat disk or membrane of a transmissive material having a suitable index of refraction. By virtue of its thinness, the DOE concentrator would have an areal mass density significantly less than that of a functionally equivalent conventional mirror. The DOE concentrator would have a relatively wide aperture--characterized by a focal-length/aperture-diameter ratio ('f number') on the order of 1. A kinoform (a surface-relief phase hologram) of high diffractive order would be microfabricated onto one face of the disk. The kinoform (see figure) would be designed to both diffract and refract incident solar radiation onto a desired focal region, without concern for forming an image of the Sun. The high diffractive order of this kinoform (in contradistinction to the low diffractive orders of some other kinoforms) would be necessary to obtain the desired f number of 1, which, in turn, would be necessary for obtaining a desired concentration ratio of 2,500 or greater. The design process of optimizing the concentration ratio of a proposed DOE solar concentrator includes computing convolutions of the optical bandwidth of the Sun with the optical transmission of the diffractive medium. Because, as in the cases of other non-imaging, light-concentrating optics, image quality is not a design requirement, the process also includes trading image quality against concentration ratio. A baseline design for one example calls for an aperture diameter of 1 m. This baseline design would be scalable to a diameter as large as 10 m, or to a smaller diameter for a laboratory test article. Initial calculations have indicated that the characteristics of the test article would be readily scalable to a full-size unit.

Baron, Richard↗