Engineering topics
Publications and source records attributed to Bates, E. T., Jr..
Random-fault densities measured in array of standard structures. Test pattern is array of standard circuit elements built into circuit chip along with, or in lieu of, integrated circuit objective process. Measurements on ray made and interpreted so fabrication process can be corrected as necessary.
Automatic Monitoring System for time-dependent dielectric breakdown tests ninety-nine metal-oxide semiconductor capacitors simultaneously. Each breakdown generates voltage spike registered on readouts and indicated by LED. Latching circuit prevents recording of possible subsequent breakdowns in same capacitor. In addition to research use, system could also be adapted for quality control.
Method allows flatband voltage measurement of capacitors to be taken quickly and precisely while capacitor is subject to desired conditions.
Flow switch operable at low flow rates is used for detecting the flow of a water coolant in a vacuum deposition apparatus. This switch utilizes one or more reed switches which are actuated by a sliding magnet.