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Beaux, Miles Frank

Publications and source records attributed to Beaux, Miles Frank.

Characterization of Thin Walled Mo Tubing produced by FBCVD

The goal of this report is to delineate the results of material characterization performed on Mo tubing produced via the fluidized bed chemical vapor deposition (FBCVD) method. Scanning electron microscopy (SEM) imaging reveals that small randomly oriented grains are achieved in the Mo deposition, but do not persist throughout the entire thickness of the material. Energy dispersive spectroscopy (EDS) reveals the Mo tubes contain residual chlorine and oxygen. EDS measurements on the tube surfaces separated from glass and quartz substrates reveal substrate material adhered to this surface. X-ray diffraction (XRD) revealed the presence of carbon contaminant in the form of Mo 2 C and oxygen in the form of MoO 2 . Combustion infrared detection (CID) and inert gas fusion (IGF) performed at Luvak Inc. was used to quantify weight percentages of oxygen and carbon in the tubes produced. Hardness value of the FBCVD Mo was found to be comparable to low carbon arc cast molybdenum.

36 MATERIALS SCIENCE↗