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Beheim, G.

Publications and source records attributed to Beheim, G..

Novel High Temperature Capacitive Pressure Sensor Utilizing SiC Integrated Circuit Twin Ring Oscillators

This paper describes initial development and testing of a novel high temperature capacitive pressure sensor system. The pressure sensor system consists of two 4H-SiC 11-stage ring oscillators and a SiCN capacitive pressure sensor. One oscillator has the capacitive pressure sensor fixed at one node in its feedback loop and varies as a function of pressure and temperature while the other provides a pressure-independent reference frequency which can be used to temperature compensate the output of the first oscillator. A two-day repeatability test was performed up to 500C on the oscillators and the oscillator fundamental frequency changed by only 1. The SiCN capacitive pressure sensor was characterized at room temperature from 0 to 300 psi. The sensor had an initial capacitance of 3.76 pF at 0 psi and 1.75 pF at 300 psi corresponding to a 54 change in capacitance. The integrated pressure sensor system was characterized from 0 to 300 psi in steps of 50 psi over a temperature range of 25 to 500C. The pressure sensor system sensitivity was 0.113 kHzpsi at 25C and 0.026 kHzpsi at 500C.

high temperature

Fiber-linked interferometric pressure sensor

A fiber-optic pressure sensor is described which uses a diaphragm to modulate the mirror separation of a Fabry-Perot cavity (the sensing cavity). A multimode optical fiber delivers broadband light to the sensing cavity and returns the spectrally modulated light which the cavity reflects. The sensor's output spectrum is analyzed using a tunable Fabry-Perot cavity (the reference cavity) to determine the mismatch in the mirror separations of the two cavities. An electronic servo control uses this result to cause the mirror separation of the reference cavity to equal that of the sensing cavity. The displacement of the pressure-sensing diaphragm is then obtained by measuring the capacitance of the reference cavity's metal-coated mirrors. Relative to other fiber-optic sensors, an important advantage of this instrument is its high immunity to the effects of variations in both the transmissivity of the fiber link and the wavelength of the optical source.

Beheim, G.

Fiber-optic photoelastic pressure sensor with fiber-loss compensation

A new fiber-optic pressure sensor is described that has high immunity to the effects of fiber-loss variations. This device uses the photoelastic effect to modulate the proportion of the light from each of two input fibers that is coupled into each of two output fibers. This four-fiber link permits two detectors to be used to measure the sensor's responses to the light from each of two independently controlled sources. These four detector outputs are processed to yield a loss-compensated signal that is a stable and sensitive pressure indicator.

Beheim, G.

Fiber-optic interferometer using frequency-modulated laser diodes

This paper describes an electrically passive fiber-optic interferometer which uses dual frequency-modulated laser diodes. Experimental results show that this type of interferometer can attain a displacement range of 100 micron with subnanometer resolution. This technique can serve as the basis for a number of high-precision fiber-optic sensors.

Beheim, G.

Range finding using frequency-modulated laser diode

A coherent-optical time-of-flight range-finding technique is proposed which uses a simple inexpensive device. Target range is determined by modulating a laser diode's optical frequency and measuring the change in the phase of the light reflected back into the laser. Target velocity as well as range can be measured using this approach. The device is described, and experimental evidence is presented to show the feasibility of measuring distance with subcentimeter resolution over a 1.5-m range.

Beheim, G.

Fibre-optic thermometer using semiconductor-etalon sensor

A fiber-optic thermometer is described which uses a thick-film SiC sensing etalon. The etalon's temperature-dependent phase shift is determined by analyzing its spectral reflectance, using an LED and a tunable Michelson interferometer. Temperatures from 20 to 1000 C are measured with better than 0.5 deg C resolution.

Beheim, G.

Wavelength-division multiplexed digital optical position transducer

A novel concept for a digital optical position tranducer is presented. This compact and rugged device is electrically passive and requires only a dual-fiber optical link. Wavelength division of a broad-spectrum semiconductor light source is employed to multiplex the channels of a 10-bit digital position encoder. A preliminary design was evaluated and found to have a 10-dB on-off contrast ratio and a 12-dB insertion loss.

Fritsch, K.

Loss-compensation of intensity-modulating fiber-optic sensors

This report describes a new type of intensity-modulating fiber-optic sensor which has high immunity to the effects of variations in the losses of the fiber-link. A variable-splitting-ratio transducer is used to differentially modulate the intensities of the light which it transmits and reflects. Using a four-fiber optical link, light is impinged onto the transducer from either direction, and, in each case, the transmitted and reflected signals are measured. These four signals are then processed to remove the effects of the fiber and connector losses. Loss-compensated sensors of angular position and displacement are described, and their outputs are shown to be highly stable despite considerable variations in the transmissivities of the fiber-link components.

Beheim, G.

Remote displacement measurement using a passive interferometer with a fiber-optic link

Remote displacement measurement is demonstrated using a Fabry-Perot cavity with a multimode optical fiber link. The sensing cavity modulates, as a function of its length, the spectrum of a light-emitting diode (LED). The light returns via the fiber and is analyzed by a tunable reference cavity. A closed-loop control causes the reference cavity to track the sensing cavity length within 2 x 10 to the -12th m. Displacement range is 2 x 10 to the -6th m. The reference cavity length is measured interferometrically, using a laser, to obtain the sensing cavity length. Advantages of this sensing technique include compatibility with multimode fiber-optic components, high immunity to optical losses, and large dynamic range.

Beheim, G.

Remote displacement measurements using a laser diode

A technique for measuring displacements remotely to minimum distances of 8 mm with a resolution of 2 microns is described. A dynamic interferometer method is employed using a frequency-ramped laser diode. A direct measurement of the period of the resulting beat signal is used to determine the displacement.

Beheim, G.