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Bennett, Douglas A.

Publications and source records attributed to Bennett, Douglas A..

Nanoscale Three-Dimensional Imaging of Integrated Circuits Using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer

X-ray nanotomography is a powerful tool for the characterization of nanoscale materials and structures, but it is difficult to implement due to the competing requirements of X-ray flux and spot size. Due to this constraint, state-of-the-art nanotomography is predominantly performed at large synchrotron facilities. We present a laboratory-scale nanotomography instrument that achieves nanoscale spatial resolution while addressing the limitations of conventional tomography tools. The instrument combines the electron beam of a scanning electron microscope (SEM) with the precise, broadband X-ray detection of a superconducting transition-edge sensor (TES) microcalorimeter. The electron beam generates a highly focused X-ray spot on a metal target held micrometers away from the sample of interest, while the TES spectrometer isolates target photons with a high signal-to-noise ratio. This combination of a focused X-ray spot, energy-resolved X-ray detection, and unique system geometry enables nanoscale, element-specific X-ray imaging in a compact footprint. The proof of concept for this approach to X-ray nanotomography is demonstrated by imaging 160 nm features in three dimensions in six layers of a Cu-SiO 2 integrated circuit, and a path toward finer resolution and enhanced imaging capabilities is discussed.

47 OTHER INSTRUMENTATION↗

Absolute Energy Measurements with Superconducting Transition-Edge Sensors for Muonic X-ray Spectroscopy at 44 keV

Superconducting transition-edge sensor (TES) microcalorimeters have great utility in X-ray applications owing to their high energy resolution, good collecting efficiency and the feasibility of being multiplexed into large arrays. In this work, we develop hard X-ray TESs to measure the absolute energies of muonic-argon (R-Ar) transition lines around 44 keV and 20 keV. TESs with sidecar absorbers of different heat capacities were fabricated and characterized for their energy resolution and calibration uncertainty. Here, we achieved similar to 1 eV absolute energy measurement accuracy at 44 keV, and < 12 eV energy resolution at 17.5 keV.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

Hyperspectral X-ray Imaging: Progress Towards Chemical Analysis in the SEM

The Hyperspectral X-ray Imaging (HXI) project will enable non-destructive chemical-state determination of nano-scale samples in the electron microscope for nuclear safeguards applications. To efficiently measure chemical state through electron-excited X-ray emission requires a combination of wide spectral bandwidth, high resolution, and high count rate capability. We are building a next-generation X-ray detector based on an array of transition edge sensors (TESs) to make these measurements possible and routine in the scanning electron microscope (SEM). Leveraging the large pixel densities afforded by microwave multiplexing readout and continuous, uninterrupted operation of a cryogen-free dilution refrigerator, this instrument will have efficiency to allow chemical species identification of nano-scale samples in hours instead of days to weeks. We describe prototype pixel designs for this HXI instrument, comprising three pixel types that will make up the hybrid TES array. Engineering design of the integrated HXI cryostat and SEM system is in progress, with full detector commissioning expected in Spring 2021 followed closely by full-scale integration with the SEM. Furthermore, we also report on the commissioning of a complementary TES-based X-ray emission spectroscopy platform for bulk samples to build a spectral library for HXI sample identification.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Development of Space-Flight Compatible Room-Temperature Electronics for the Lynx X-Ray Microcalorimeter

We are studying the development of space-flight compatible room-temperature electronics for the Lynx x-ray microcalorimeter (LXM) of the Lynx mission. The baseline readout technique for the LXM is microwave SQUID multiplexing. The key modules at room temperature are the RF electronics module and the digital electronics and event processor (DEEP). The RF module functions as frequency converters and mainly consists of local oscillators and I/Q mixers. The DEEP performs demultiplexing and event processing, and mainly consists of field-programmable gate arrays, ADCs, and DACs. We designed the RF electronics and DEEP to be flight ready, and estimated the power, size, and mass of those modules. There are two boxes each for the RF electronics and DEEP for segmentation, and the sizes of the boxes are 13 in: × 13 in: × 9 in: for the RF electronics and 15.5 in: × 11.5 in: × 9.5 in: for the DEEP. The estimated masses are 25.1 kg∕box for the RF electronics box and 24.1 kg∕box for the DEEP box. The maximum operating power for the RF electronics is 141 W or 70.5 W∕box, and for the DEEP box is 615 W or 308 W∕box. The overall power for those modules is 756 W. We describe the detail of the designs as well as the approaches to the estimation of resources, sizes, masses, and powers.

Sakai, Kazuhiro↗

Microwave SQUID Multiplexing for the Lynx X-Ray Microcalorimeter

The Lynx x-ray microcalorimeter (LXM) is an imaging spectrometer for the Lynx satellite mission, an x-ray telescope being considered by NASA to be a new flagship mission. Lynx will enable unique astrophysical observations into the x-ray universe due to its high angular resolution and large field of view. The LXM consists of an array of over 100,000 pixels and poses a significant technological challenge to achieve the high degree of multiplexing required to read out these sensors. We discuss the details of microwave superconducting quantum interference device (SQUID) multiplexing and describe why it is ideally suited to the needs of the LXM. This case is made by summarizing the current and predicted performance of microwave SQUID multiplexing and describing the steps needed to optimize designs for all the LXM arrays. Finally, we describe our plan to advance the technology readiness level (TRL) of microwave SQUID multiplexing of the LXM microcalorimeters to TRL-5 by 2024.

Bennett, Douglas A.↗

Toward Large FOV High-Resolution X-Ray Imaging Spectrometer: Microwave Multiplexed Readout of 32 TES Microcalorimeters

We performed a small-scale demonstration at GSFC of high-resolution x-ray TES microcalorimeters read out using a microwave SQUID multiplexer. This work is part of our effort to develop detector and readout technologies for future space based x-ray instruments such as the microcalorimeter spectrometer envisaged for Lynx, a large mission concept under development for the Astro 2020 Decadal Survey. In this paper we describe our experiment, including details of a recently designed, microwave-optimized low-temperature setup that is thermally anchored to the 50 mK stage of our laboratory ADR. Using a ROACH2 FPGA at room temperature, we simultaneously read out 32 pixels of a GSFC-built detector array via a NIST-built multiplexer chip with Nb coplanar waveguide resonators coupled to RF SQUIDs. The resonators are spaced 6 MHz apart (at approx. 5.9 GHz) and have quality factors of approximately 15,000. Using flux-ramp modulation frequencies of 160 kHz we have achieved spectral resolutions of 3 eV FWHM on each pixel at 6 keV. We will present the measured system-level noise and maximum slew rates, and briefly describe the implications for future detector and readout design.

Yoon, Wonsik↗