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Chang, C. H.

Publications and source records attributed to Chang, C. H..

Diffusion, Fluxes, Friction Forces, and Joule Heating in Two-Temperature Multicomponent Magnetohydrodynamics

The relationship between Joule heating, diffusion fluxes, and friction forces has been studied for both total and electron thermal energy equations, using general expressions for multicomponent diffusion in two-temperature plasmas with the velocity dependent Lorentz force acting on charged species in a magnetic field. It is shown that the derivation of Joule heating terms requires both diffusion fluxes and friction between species which represents the resistance experienced by the species moving at different relative velocities. It is also shown that the familiar Joule heating term in the electron thermal energy equation includes artificial effects produced by switching the convective velocity from the species velocity to the mass-weighted velocity, and thus should not be ignored even when there is no net energy dissipation.

Chang, C. H.↗

A Transport Model for Non-Local Heating of Electrons in ICP Reactors

A new model has been developed for non-local heating of electrons in ICP reactors, based on a hydrodynamic approach. The model has been derived using the electron momentum conservation in azimuthal direction with electromagnetic and frictional forces respectively as driving force and damper of harmonic oscillatory motion of electrons. The resulting transport equations include the convection of azimuthal electron momentum in radial and axial directions, thereby accounting for the non-local effects. The azimuthal velocity of electrons and the resulting electrical current are coupled to the Maxwell's relations, thus forming a self-consistent model for non-local heating. This model is being implemented along with a set of Navier-Stokes equations for plasma dynamics and gas flow to simulate low-pressure (few mTorr's) ICP discharges. Characteristics of nitrogen plasma in a TCP 300mm etch reactor is being studied. The results will be compared against the available Langmuir probe measurements.

Chang, C. H.↗

Flow Characteristics of UHV Nitrogen Arcjet

Flow characteristics in the nozzle of a nitrogen arcjet have been simulated by a model. Electrons, ions, and neutral atoms and molecules are represented as separate species. Dissociation, ionization, and recombination are treated as separate reactions. Thermal non-equilibrium is represented by a two-temperature model. Energy input to plasma from the arc is modeled as a source determined by local current and electrical conductivity. Momentum and energy losses and recombinations at the nozzle wall are included as source/sink determined by fluxes to the wall. The results show essentially frozen gas-phase reactions and thermal nonequilibrium due to Joule heating of electrons and in the expansion part of the nozzle. Wall interactions have strong effects on the results, indicating that they play important roles in the flow due to very high surface area relative to the volume of the plasma. For example, plasma velocity decreases from 6000 m per s without wall interactions to 3000 m per s with modest amount of wall interactions. These results also show reasonable agreement with optical emission measurements, which confirms that the arcjet plasma is far from LTE. The spectra suggest nitrogen dissociation levels of 0.3% - 9%, depending on nitrogen flow rate and arc plasma current, which also determine the relative amounts of excited atomic and molecular nitrogen. Langmuir probe studies of the source show that electron and ion fluxes increase with increasing power, and that the ion energy distribution shifts to lower energies. Typical ion fluxes were on the order of 4E-9 A/cm**2 with a maximum ion kinetic energy of 3.5eV. The median electron energy was 1eV, with a maximum of less than 4eV.

Chang, C. H.↗

Na + Xe collisions in the presence of two nonresonant lasers

Na+Xe collisions in the presence of two distinct laser fields (rhodamine 110 and Nd:glass) are investigated with reference to the response to nonresonant radiation of alkali metals collisionally perturbed by a buffer gas. It is found that the excited Na-asterisk (4s)+Xe state is produced with a measurable cross section due to two-photon absorption with field intensities as low as 10 MW/sq cm.

De Vries, P. L.↗

Remote measurement of ocean temperature from depolarization in Raman scattering

Ocean temperatures may be mapped in three dimensions from an aircraft down to depths of 2 to 4 attenuation lengths by monitoring Raman radiation backscattered from a laser beam. This paper describes laboratory experiments on the temperature dependence of Raman spectra of saline solutions and calculations of the expected performance of a field system. The Raman technique is of greatest potential utility in coastal and estuarine waters where gradients are relatively high. It is estimated that seawater temperature may be measured to a statistical precision of 0.5 C at depths to four attenuation lengths in two meter water, using one Joule of transmitted laser energy.

Chang, C. H.↗