Search NASA⌕ Search

Engineering topics

Chang, C. L.

Publications and source records attributed to Chang, C. L..

At least 19 records

Measurement of the Full Shape of the Thermal Sunyaev–Zel’dovich Power Spectrum from the South Pole Telescope and Herschel–SPIRE Observations

We present a measurement of the full shape of the power spectrum of the thermal Sunyaev–Zel’dovich (tSZ) effect down to arcminute scales using cosmic microwave background (CMB) data from the South Pole Telescope (SPT) over a roughly 100 deg 2 field. The analysis incorporates data from the 2019–2020 seasons of the SPT-3G survey in bands centered at 95, 150, and 220 GHz; from the full SPTpol dataset at 150 GHz; and from the Herschel–SPIRE survey in bands centered at 600 and 857 GHz. We combine data from all the above bands using linear combination (LC) techniques to produce a tSZ or Compton-y map. We modify the LC weights to produce multiple versions of the Compton-y map, including minimum-variance (MV) and foreground-minimized (-min) maps. We measure the auto- and cross-power spectra of a subset of these maps in the range ℓ ∈ [500, 5000]. While this power spectrum includes contributions from signals other than tSZ, we present numerous checks to show that the most challenging foreground signal, the cosmic infrared background (CIB), is much lower than the desired tSZ signal in the scales of interest in this work. The final tSZ power spectrum is measured at 9.3σ with both the MV and CIB-min maps. Our results are consistent with those reported in other CMB surveys across the literature. Using the difference in the tSZ power spectrum from the MV and CIB-min maps, we reconstruct the scale-dependent tSZ–CIB cross correlation $ρ^{\textrm{tSZ}}_{ℓ}$ x CIB, finding 3.1σ evidence for a nonzero correlation coefficient that is positive on large scales and approaches zero for ℓ > 2500. This result represents the deepest tSZ maps ever produced and provides new constraints that can help refine astrophysical feedback mechanisms and models of the intracluster medium.

Raghunathan, S. [Univ. of California, Davis, CA (U↗

Detection of Thermal Emission at Millimeter Wavelengths from Low-Earth Orbit Satellites

The detection of satellite thermal emission at millimeter wavelengths is presented using data from the 3rd-Generation receiver on the South Pole Telescope (SPT-3G). This represents the first reported detection of thermal emission from artificial satellites at millimeter wavelengths. Satellite thermal emission is shown to be detectable at high signal-to-noise on timescales as short as a few tens of milliseconds. An algorithm for downloading orbital information and tracking known satellites given observer constraints and time-ordered observatory pointing is described. Consequences for cosmological surveys and short-duration transient searches are discussed, revealing that the integrated thermal emission from all large satellites does not contribute significantly to the SPT-3G survey intensity map. Measured satellite positions are found to be discrepant from their two-line element (TLE) derived ephemerides up to several arcminutes which may present a difficulty in cross-checking or masking satellites from short-duration transient searches.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

Measurement and Modeling of Polarized Atmosphere at the South Pole with SPT-3G

We present the detection and characterization of fluctuations in linearly polarized emission from the atmosphere above the South Pole. These measurements make use of data from the SPT-3G receiver on the South Pole Telescope in three frequency bands centered at 95, 150, and 220 GHz. We use the cross-correlation between detectors to produce an unbiased estimate of the power in Stokes I, Q, and U parameters on large angular scales. Our results are consistent with the polarized signal being produced by the combination of Rayleigh scattering of thermal radiation from the ground and thermal emission from a population of horizontally aligned ice crystals with an anisotropic distribution described by Kolmogorov turbulence. The measured spatial scaling, frequency scaling, and elevation dependence of the polarized emission are explained by this model. Polarized atmospheric emission has the potential to significantly impact observations on the large angular scales being targeted by searches for inflationary B-mode CMB polarization. We present the distribution of measured angular power spectrum amplitudes in Stokes Q and I for 4 yr of Austral winter observations, which can be used to simulate the impact of atmospheric polarization and intensity fluctuations at the South Pole on a specified experiment and observation strategy. We present a mitigation strategy that involves both downweighting significantly contaminated observations and subtracting a polarized atmospheric signal from the 150 GHz band maps. In observations with the SPT-3G instrument, the polarized atmospheric signal is a well-understood and subdominant contribution to the measured noise after implementing the mitigation strategies described here.

79 ASTRONOMY AND ASTROPHYSICS↗

Demonstration of the HeRALD superfluid helium detector concept

The SPICE/HeRALD collaboration is performing research and development to enable studies of sub-GeV dark matter models using a variety of target materials. Here we report our recent progress on instrumenting a superfluid 4 He target mass with a transition-edge sensor based calorimeter to detect both atomic signals (scintillation) and 4 He quasiparticle (phonon and roton) excitations. The sensitivity of HeRALD to the critical “quantum evaporation” signal from 4 He quasiparticles requires us to block the superfluid film flow to the calorimeter. We have developed a heat-free film-blocking method employing an unoxidized Cs film, which we implemented in a prototype “HeRALD v0.1” detector of ~10 g target mass. This article reports initial studies of the atomic and quasiparticle signal channels. Here, a key result of this work is the measurement of the quantum evaporation channel’s gain of 0.15±0.01, which will enable 4 He-based dark matter experiments in the near term. With this gain the HeRALD detector reported here has an energy threshold of 145 eV at 5⁢σ, which would be sensitive to dark matter masses down to 220 MeV/c 2 .

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

SPT clusters with DES and HST weak lensing. II. Cosmological constraints from the abundance of massive halos

We present cosmological constraints from the abundance of galaxy clusters selected via the thermal Sunyaev-Zel’dovich (SZ) effect in South Pole Telescope (SPT) data with a simultaneous mass calibration using weak gravitational lensing data from the Dark Energy Survey (DES) and the Hubble Space Telescope (HST). The cluster sample is constructed from the combined SPT-SZ, SPTpol ECS, and SPTpol 500d surveys, and comprises 1,005 confirmed clusters in the redshift range 0.25–1.78 over a total sky area of 5200 deg 2 . We use DES Year 3 weak-lensing data for 688 clusters with redshifts 𝑧 < 0.95 and HST weak-lensing data for 39 clusters with 0.6 < 𝑧 < 1.7. The weak-lensing measurements enable robust mass measurements of sample clusters and allow us to empirically constrain the SZ observable-mass relation without having to make strong assumptions about, e.g., the hydrodynamical state of the clusters. For a flat Λ⁢ CDM cosmology, and marginalizing over the sum of massive neutrinos, we measure Ω m = 0.286 ± 0.032, 𝜎 8 = 0.817 ± 0.026, and the parameter combination 𝜎 8 ⁢(Ω m /0.3) 0.25 = 0.805 ± 0.016. Our measurement of 𝑆 8 ≡ 𝜎 8 ⁢$\sqrt{Ω_{m}/0.3}$ = 0.795 ± 0.029 and the constraint from Planck CMB anisotropies (2018 TT, TE, EE+lowE) differ by 1.1⁢𝜎. In combination with that Planck dataset, we place a 95% upper limit on the sum of neutrino masses ∑𝑚 𝜈 < 0.18 eV. When additionally allowing the dark energy equation of state parameter 𝑤 to vary, we obtain 𝑤 = −1.45 ± 0.31 from our cluster-based analysis. In combination with Planck data, we measure 𝑤 =−1.3⁢4$^{+0.22}_{−0.15}$, or a 2.2⁢𝜎 difference with a cosmological constant. We use the cluster abundance to measure 𝜎8 in five redshift bins between 0.25 and 1.8, and we find the results to be consistent with structure growth as predicted by the Λ⁢ CDM model fit to Planck primary CMB data.

79 ASTRONOMY AND ASTROPHYSICS↗

First Constraints on the Epoch of Reionization Using the Non-Gaussianity of the Kinematic Sunyaev-Zel’dovich Effect from the South Pole Telescope and Herschel-SPIRE Observations

We report results from an analysis aimed at detecting the trispectrum of the kinematic Sunyaev-Zel’dovich (kSZ) effect by combining data from the South Pole Telescope (SPT) and Herschel-SPIRE experiments over a 100 deg 2 field. The SPT observations combine data from the previous and current surveys, namely SPTpol and SPT-3G, to achieve depths of 4.5, 3, and 16 μ K - arcmin in bands centered at 95, 150, and 220 GHz. For SPIRE, we include data from the 600 and 857 GHz bands. We reconstruct the velocity-induced large-scale correlation of the small-scale kSZ signal with a quadratic estimator that uses two cosmic microwave background (CMB) temperature maps, constructed by optimally combining data from all the frequency bands. We reject the null hypothesis of a zero trispectrum at 10.3 σ level. However, the measured trispectrum contains contributions from both the kSZ and other undesired components, such as CMB lensing and astrophysical foregrounds, with kSZ being sub-dominant. We use the agora simulations to estimate the expected signal from CMB lensing and astrophysical foregrounds. After accounting for the contributions from CMB lensing and foreground signals, we do not detect an excess kSZ-only trispectrum and use this nondetection to set constraints on reionization. By applying a prior based on observations of the Gunn-Peterson trough, we obtain an upper limit on the duration of reionization of Δ z re , 50 < 4.5 (95% confidence level). We find these constraints are fairly robust to foregrounds assumptions. This trispectrum measurement is independent of, but consistent with, Planck’s optical depth measurement. This result is the first constraint on the epoch of reionization using the non-Gaussian nature of the kSZ signal.

79 ASTRONOMY AND ASTROPHYSICS↗

Testing the ΛCDM Cosmological Model with Forthcoming Measurements of the Cosmic Microwave Background with SPT-3G

We forecast constraints on cosmological parameters enabled by three surveys conducted with SPT-3G, the third-generation camera on the South Pole Telescope. The surveys cover separate regions of 1500, 2650, and 6000 deg$^{2}$ to different depths, in total observing 25% of the sky. These regions will be measured to white noise levels of roughly 2.5, 9, and 12μK-armin, respectively, in cosmic microwave background (CMB) temperature units at 150 GHz by the end of 2024. The survey also includes measurements at 95 and 220 GHz, which have noise levels a factor of ∼1.2 and 3.5 times higher than 150 GHz, respectively, with each band having a polarization noise level ∼2times higher than the temperature noise. We use a novel approach to obtain the covariance matrices for jointly and optimally estimated gravitational lensing potential band powers and unlensed CMB temperature and polarization band powers. We demonstrate the ability to test the ΛCDM model via the consistency of cosmological parameters constrained independently from SPT-3G and Planck data, and consider the improvement in constraints on ΛCDM extension parameters from a joint analysis of SPT-3G and Planck data. The ΛCDM cosmological parameters are typically constrained with uncertainties up to ∼2 times smaller with SPT-3G data, compared to Planck, with the two data sets measuring significantly different angular scales and polarization levels, providing additional tests of the standard cosmological model.

79 ASTRONOMY AND ASTROPHYSICS↗

Flaring Stars in a Non-targeted mm-wave Survey with SPT-3G

We present a flare star catalog from four years of non-targeted millimeter-wave survey data from the South Pole Telescope (SPT). The data were taken with the SPT-3G camera and cover a 1500-square-degree region of the sky from $20^{h}40^{m}0^{s}$ to $3^{h}20^{m}0^{s}$ in right ascension and $-42^{\circ}$ to $-70^{\circ}$ in declination. This region was observed on a nearly daily cadence from 2019-2022 and chosen to avoid the plane of the galaxy. A short-duration transient search of this survey yields 111 flaring events from 66 stars, increasing the number of both flaring events and detected flare stars by an order of magnitude from the previous SPT-3G data release. We provide cross-matching to Gaia DR3, as well as matches to X-ray point sources found in the second ROSAT all-sky survey. We have detected flaring stars across the main sequence, from early-type A stars to M dwarfs, as well as a large population of evolved stars. These stars are mostly nearby, spanning 10 to 1000 parsecs in distance. Most of the flare spectral indices are constant or gently rising as a function of frequency at 95/150/220 GHz. The timescale of these events can range from minutes to hours, and the peak $\nu L_{\nu}$ luminosities range from $10^{27}$ to $10^{31}$ erg s$^{-1}$ in the SPT-3G frequency bands.

79 ASTRONOMY AND ASTROPHYSICS↗

Mass calibration of DES Year-3 clusters via SPT-3G CMB cluster lensing

We measure the stacked lensing signal in the direction of galaxy clusters in the DarkEnergy Survey Year 3 (DES Y3) redMaPPer sample, using cosmic microwave background (CMB)temperature data from SPT-3G, the third-generation CMB camera on the South PoleTelescope (SPT). Here, we estimate the lensing signal using temperature maps constructed fromthe initial 2 years of data from the SPT-3G 'Main' survey, covering 1500 deg$^{2}$ of the Southernsky. We then use this lensing signal as a proxy for the mean cluster mass of the DES sample. Thethermal Sunyaev-Zel'dovich (tSZ) signal, which can contaminate the lensing signal if notaddressed, is isolated and removed from the data before obtaining the mass measurement. In thiswork, we employ three versions of the redMaPPer catalogue: a Flux-Limited sample containing 8865clusters, a Volume-Limited sample with 5391 clusters, and a Volume&Redshift-Limited sample with4450 clusters. For the three samples, we detect the CMB lensing signal at a significance of12.4σ, 10.5σ and 10.2σ and find the mean cluster masses to be M$_{200m}$ = 1.66±0.13 [stat.]± 0.03 [sys.], 1.97±0.18 [stat.]± 0.05 [sys.],and 2.11±0.20 [stat.]± 0.05 [sys.]×10$^{14}$ M$_{⊙}$, respectively. Thisis a factor of ∼ 2 improvement relative to the precision of measurements with previousgenerations of SPT surveys and the most constraining cluster mass measurements using CMB clusterlensing to date. Overall, we find no significant tensions between our results and masses given byredMaPPer mass-richness scaling relations of previous works, which were calibrated using CMBcluster lensing, optical weak lensing, and velocity dispersion measurements from variouscombinations of DES, SDSS and Planck data. We then divide our sample into 3 redshift and 3richness bins, finding no significant discrepancies with optical weak-lensing calibrated masses inthese bins. We forecast a 5.7% constraint on the mean cluster mass of the DES Y3 sample withthe complete SPT-3G surveys when using both temperature and polarization data and including anadditional ∼ 1400 deg$^{2}$ of observations from the 'Extended' SPT-3G survey.

79 ASTRONOMY AND ASTROPHYSICS↗

Tuning the Superconducting Transition Temperature of Co-sputtered Iridium and Platinum Films

A superconducting film with a tunable low transition temperature (Tc) is required in high-resolution Transition-Edge Sensor (TES) detectors, which have applications including dark matter detection, low threshold coherent elastic neutrino nucleus scattering measurement, and X-ray spectroscopy. We have been investigating a new approach to tune the Tc of superconducting thin films fabricated by co-sputtering Iridium and Platinum. The effects of Pt concentration and deposition parameters on the films' structural, electrical, and superconducting properties have been studied. AFM and XRD techniques and low temperature resistance measurements have been utilized for film characterization. By varying the Pt concentration and deposition parameters when co-sputtering, we have successfully achieved controllable tuning of Tc in the range of 30-200 mK. The experimental results demonstrate co-sputtering as a viable method for controlling the Tc of Ir-based thin films that can be applied to fabricating high-resolution TESs.

Yefremenko, V. G.↗

Modeling and Characterization of TES-Based Detectors for the Ricochet Experiment

Coherent elastic neutrino-nucleus scattering (CE nu NS) offers a valuable approach in searching for physics beyond the standard model. The Ricochet experiment aims to perform a precision measurement of the CE nu NS spectrum at the Institut Laue-Langevin nuclear reactor with cryogenic solid-state detectors. The experiment plans to employ an array of cryogenic thermal detectors, each with a mass of around 30 g and an energy threshold of below 100 eV. The array includes nine detectors read out by transition-edge sensors (TES). These TES-based detectors will also serve as demonstrators for future neutrino experiments with thousands of detectors. In this article, we present an update on the characterization and modeling of a prototype TES detector.

Chang, C. L.↗

Properties of Low Tc AlMn TES

Low Tc AlMn transition-edge sensors (TESs) have been developed as sensitive thermometers for the Q-Array, which will use superconducting targets to measure the coherent elastic neutrino nucleus scattering spectrum in the RICOCHET experiment. The TESs are made of manganese-doped aluminum with a titanium and gold antioxidation layer. A prototype TES thermometer consists of two TESs in parallel, an input gold pad in metallic contact with the TESs and an output gold pad and gold thermal link meanders, which are each designed to control the flow of heat through the TESs. We have fabricated and measured low TC AlMn TES chips with or without thermal flow control structures. We present TC measurements of the TESs after the initial fabrication and further TC tuning by re-heating and summarize the thermal property studies of the prototype TES thermometer by measuring I-V curves and complex impedance.

Coherent elastic neutrino nucleus scattering, Cryo↗

Galaxy Clusters Discovered via the Thermal Sunyaev-Zel’dovich Effect in the 500-square-degree SPTpol Survey

We present a catalog of 689 galaxy cluster candidates detected at significance ξ > 4 via their thermal Sunyaev-Zel’dovich (SZ) effect signature in 95 and 150 GHz data from the 500-square-degree SPTpol survey. We use optical and infrared data from the Dark Energy Camera and the Wide-field Infrared Survey Explorer (WISE) and Spitzer satellites, to confirm 544 of these candidates as clusters with ~ 94% purity. The sample has an approximately redshift-independent mass threshold at redshift z > 0.25. The confirmed sample spans 1.5 × 10 14 < M 500 c < 9 × 10 14 M ⊙ /h 70 and 0.03 < z ≲ 1.6 in mass and redshift, respectively, with a median mass of 2.5×10 14 M ⊙ /h 70 and median redshift z = 0.7; 21% of the confirmed clusters are at z > 1. We use external radio data from the Sydney University Molonglo Sky Survey (SUMSS) to estimate contamination to the SZ signal from synchrotron sources. The contamination reduces the recovered ξ by a median value of 0.032, or ~ 0.8% of the ξ = 4 threshold value, and ~ 7% of candidates have a predicted contamination greater than Δξ = 1. With the exception of a small number of systems (< 1%), an analysis of clusters detected in single-frequency 95 and 150 GHz data shows no significant contamination of the SZ signal by emission from dusty or synchrotron sources. This cluster sample, representing the deepest SZ-selected cluster sample to date, will be a key component in upcoming astrophysical and cosmological analyses of clusters. In addition to the cluster catalog, we also release the millimeter-wave maps and associated data products used to produce this sample. These maps have depths of 5.3 (11.7) µK CMB -arcmin at 150 (95) GHz and an effective angular resolution of 1. '2 (1. '7). The SPTpol products are available at https:// pole.uchicago.edu/public/data/sptpol_500d_clusters/index.html, and the NASA LAMBDA website. An interactive sky server with the SPTpol maps and Dark Energy Survey data release 2 images is also available at NCSA https://skyviewer.ncsa.illinois.edu.

79 ASTRONOMY AND ASTROPHYSICS↗

Measurement of gravitational lensing of the cosmic microwave background using SPT-3G 2018 data

We present a measurement of gravitational lensing over 1500 deg 2 of the Southern sky using SPT-3G temperature data at 95 GHz and 150 GHz taken in 2018. The lensing amplitude relative to a fiducial Planck 2018 Lambda cold dark matter ( Λ CDM ) cosmology is found to be 1.020 ± 0.060 , excluding instrumental and astrophysical systematic uncertainties. We conduct extensive systematic and null tests to check the robustness of the lensing measurements, and report a minimum-variance combined lensing power spectrum over angular multipoles of 50 < L < 2000 , which we use to constrain cosmological models. When analyzed alone and jointly with primary cosmic microwave background (CMB) spectra within the Λ CDM model, our lensing amplitude measurements are consistent with measurements from SPT-SZ, SPTpol, ACT, and Planck. Incorporating loose priors on the baryon density and other parameters including uncertainties on a foreground bias template, we obtain a 1 σ constraint on σ 8 Ω m 0.25 = 0.595 ± 0.026 using the SPT-3G 2018 lensing data alone, where σ 8 is a common measure of the amplitude of structure today and Ω m is the matter density parameter. Combining SPT-3G 2018 lensing measurements with baryon acoustic oscillation (BAO) data, we derive parameter constraints of σ 8 = 0.810 ± 0.033 , S 8 ≡ σ 8 ( Ω m / 0.3 ) 0.5 = 0.836 ± 0.039 , and Hubble constant H 0 = 68.8 - 1.6 + 1.3 km s - 1 Mpc - 1 . Our preferred S 8 value is higher by 1.6 to 1.8 σ compared to cosmic shear measurements from DES-Y3, HSC-Y3, and KiDS-1000 at lower redshift and smaller scales. We combine our lensing data with CMB anisotropy measurements from both SPT-3G and Planck to constrain extensions of Λ CDM . Using CMB anisotropy and lensing measurements from SPT-3G only, we provide independent constraints on the spatial curvature of Ω K = 0.01 4 - 0.026 + 0.023 (95% C.L.) and the dark energy density of Ω Λ = 0.72 2 - 0.026 + 0.031 (68% C.L.). When combining SPT-3G lensing data with SPT-3G CMB anisotropy and BAO data, we find an upper limit on the sum of the neutrino masses of ∑ m ν < 0.30 eV (95% C.L.). Due to the different combination of angular scales and sky area, this lensing analysis provides an independent check on lensing measurements by ACT and Planck.

79 ASTRONOMY AND ASTROPHYSICS↗

Large-area photon calorimeter with Ir-Pt bilayer transition-edge sensor for the CUPID experiment

CUPID is a next-generation neutrinoless double-β decay experiment that will require cryogenic light detectors to improve background suppression, via the simultaneous readout of heat and light channels from its scintillating crystals. In this work, we showcase light detectors based on an alternative Ir-Pt bilayer transition-edge sensor. We have performed a systematic study to improve the thermal coupling between the photon absorber and the sensor, and thereby its responsivity. Our first devices meet CUPID's baseline noise requirement of < 100 eV rms. Our detectors have risetimes of approximately 180μs and measured timing jitter of < 20μs for the expected signal to noise at the Q value of the decay, which achieves the CUPID's criterion of rejecting two-neutrino double-β decay pile-up events. In conclusion, the current work will inform the fabrication of future devices, culminating in the final TES design and a scaleable readout scheme for CUPID.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

Electromagnetic Properties of Aluminum-based Bilayers for Kinetic Inductance Detectors

The complex conductivity of a superconducting thin film is related to the quasiparticle density, which depends on the physical temperature and can also be modified by external pair breaking with photons and phonons. This relationship forms the underlying operating principle of Kinetic Inductance Detectors (KIDs), where the detection threshold is governed by the superconducting energy gap. We investigate the electromagnetic properties of thin-film aluminum that is proximitized with either a normal metal layer of copper or a superconducting layer with a lower T-C, such as iridium, in order to extend the operating range of KIDs. Using the Usadel equations along with the Nam expressions for complex conductivity, we calculate the density of states and the complex conductivity of the resulting bilayers to understand the dependence of the pair breaking threshold, surface impedance, and intrinsic quality factor of superconducting bilayers on the relative film thicknesses. The calculations and analyses provide theoretical insights in designing aluminum-based bilayer kinetic inductance detectors for detection of microwave photons and athermal phonons at the frequencies well below the pair breaking threshold of a pure aluminum film.

complex conductivity↗

Noise Optimization for MKIDs with Different Design Geometries and Material Selections

The separation and optimization of noise components is critical to microwave-kinetic inductance detector (MKID) development. We analyze the effect of several changes to the lumped-element inductor and interdigitated capacitor geometry on the noise performance of a series of MKIDs intended for millimeter-wavelength experiments. We extract the contributions from two-level system noise in the dielectric layer, the generation-recombination noise intrinsic to the superconducting thin-film, and system white noise from each detector noise power spectrum and characterize how these noise components depend on detector geometry, material, and measurement conditions such as driving power and temperature. We observe a reduction in the amplitude of two-level system noise with both an elevated sample temperature and an increased gap between the fingers within the interdigitated capacitors for both aluminum and niobium detectors. We also verify the expected reduction of the generation-recombination noise and associated quasiparticle lifetime with reduced inductor volume. This study also iterates over different materials, including aluminum, niobium, and aluminum manganese, and compares the results with an underlying physical model.

generation-recombination noise↗

Low-loss Si-based Dielectrics for High Frequency Components of Superconducting Detectors

Silicon-based dielectric is crucial for many superconducting devices, including high-frequency transmission lines, filters, and resonators. Defects and contaminants in the amorphous dielectric and at the interfaces between the dielectric and metal layers can cause microwave losses and degrade device performance. Optimization of the dielectric fabrication, device structure, and surface morphology can help mitigate this problem. We present the fabrication of silicon oxide and nitride thin film dielectrics. We then characterized them using Scanning Electron Microscopy, Atomic Force Microscopy, and spectrophotometry techniques. The samples were synthesized using various deposition methods, including Plasma-Enhanced Chemical Vapor Deposition and magnetron sputtering. The film's morphology and structure were modified by adjusting the deposition pressure and gas flow. The resulting films were used in superconducting resonant systems consisting of planar inductors and capacitors. Measurements of the resonator properties, including their quality factor, were performed.

low-loss dielectrics↗