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Culotta, P. W.

Publications and source records attributed to Culotta, P. W..

Gravitational and thermal effects in CVD flow and deposition

A three-phased approach is used to investigate the transport phenomena occurring in horizontal CVD reactors. The three phases are made up of laser velocimetry experimental investigations, numerical CFD modeling, and metal-organic chemical vapor deposition experimental studies. Laser velocimetry measurements of flow in a horizontal reactor with a cylindrical flow channel and tilted susceptor demonstrate velocity components arising from thermal expansion and buoyancy effects that significantly exceed the velocity components due to the external applied flow. MOCVD of InP and GaAs thin films in a horizontal reactor channel with a rectangular cross section and a tilted susceptor has also been examined.

Clark, I. O.

Characterization of MOCVD fluid dynamics by laser velocimetry

Three-component laser velocimetry techniques are applied to characterize the fluid dynamics of an MOCVD reactor. These methods provide three-dimensional quantitative measurements of the gas velocities inside the reactor at typical growth temperatures. The effects of buoyancy-induced convection are examined by comparing data from the hot reactor with cold reactor results. It was found that thermal convection dominated the fluid dynamics of the reactor at growth temperatures. Cold reactor tests showed unstable flow patterns that were subject to fluidic switching effects.

Johnson, E. J.

Laser velocimetry measurements in non-isothermal CVD systems

Researchers at the NASA Langley Research Center are applying laser velocimetry (LV) techniques to characterize the fluid dynamics of non-isothermal flows inside fused silica chambers designed for chemical vapor deposition (CVD). Experimental issues involved in the application of LV techniques to this task include thermophoretic effects on the LV seed particles, seeding the hazardous gases, index of refraction gradients in the flow field and surrounding media, optical access, relatively low flow velocities, and analysis and presentation of sparse data. An overview of the practical difficulties these issues represent to the use of laser velocimetry instrumentation for CVD applications is given. A fundamental limitation on the application of LV techniques in non-isothermal systems is addressed which involves a measurement bias due to the presence of thermal gradients. This bias results from thermophoretic effects which cause seed particle trajectories to deviate from gas streamlines. Data from a research CVD reactor are presented which indicate that current models for the interaction of forces such as Stokes drag, inertia, gravity, and thermophoresis are not adequate to predict thermophoretic effects on particle-based velocimetry measurements in arbitrary flow configurations.

Johnson, E. J.

Flow field velocity measurements for non-isothermal systems

Experimental techniques which can be potentially utilized to measure the gas velocity fields in nonisothermal CVD systems both in ground-based and space-based investigations are considered. The advantages and disadvantages of a three-component laser velocimetry (LV) system that was adapted specifically for quantitative determination of the mixed convective flows in a chamber for crystal growth and film formation by CVD are discussed. Data from a horizontal research CVD reactor indicate that current models for the effects of thermophoretic force are not adequate to predict the thermophoretic bias in arbitrary flow configurations. It is concluded that LV techniques are capable of characterizing the fluid dynamics of a CVD reactor at typical growth temperatures. Thermal effects are shown to dominate and stabilize the fluid dynamics of the reactor. Heating of the susceptor increases the gas velocities parallel to the face of a slanted susceptor by up to a factor of five.

Johnson, E. J.

CCD data processor for maximum likelihood feature classification

The paper describes an advanced technology development which utilizes a high speed analog/binary CCD correlator to perform the matrix multiplications necessary to implement onboard feature classification. The matrix manipulation module uses the maximum likelihood classification algorithm assuming a Gaussian probability density function. The module will process 16 element multispectral vectors at rates in excess of 500 thousand multispectral vector elements per second. System design considerations for the optimum use of this module are discussed, test results from initial device fabrication runs are presented, and the performance in typical processing applications is described

Benz, H. F.