Integrated 119-micron linear corner-cube array
An integrated corner-cube antenna has been designed, fabricated, and measured at 119 microns. The structure consists of a traveling-wave antenna integrated on a 1-micron dielectric membrane and suspended in a longitudinal cavity etched in silicon wafers. The patterns at 119 microns agree well with millimeter-wave patterns measured on a scaled antenna at 222 GHz. A directivity of 18 +/- 0.5 dB is calculated from E- and H-plane measurements. This work demonstrates that high-efficiency integrated corner-cube antennas are easily scalable to terahertz frequencies and could be used for radio-astronomical and plasma-diagnostic applications.
Gearhart, Steven S.↗