Materials and geometry optimization for the development of ultra-high sensitive nano-mechanical resonators
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nano MEMS↗
Engineering topics
Fathauer, R.
Publications and source records attributed to Fathauer, R..
Interferometric Optical Filters Utilizing Metal Patterns on Free-Standing Thin Substrates
A new technology for infrared optical filters is presented. We have produced a bandpass filter consisting of a thin Si wafer with cross-shaped metal patterns deposited on both sides.
infrared↗
Fabrication of Si/Si(sub 1-x)Ge(sub x)O(sub 2) Heterojunctions by Molecular Beam Epitaxy and Stain Etching
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heterojunction technology microelectronics↗
Application of Novel Epitaxy Techniques to the Growth of CrSi(sub 2)
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CrSi↗
Applications of Novel Epitaxy Techniques to the Growth of CrSi(sub 2)
CrSi sub 2 is of technological interest because it is a silicon-based semiconductor with a small band gap.
mesotaxy-produced template layers and allotaxy↗
Ballistic Electron Emission Microscopy of Metal/Group IV Interfaces
Ballistic electron emission microscopy and spectroscopy, together with related techniques, have been applied with great success to the study of buried interfaces. These probes, known collectively as BEEM, have yielded important information on interface transport, interface band structure, and carrier scattering, with lateral spatial resolution on the nanometer scale. Recent applications of the technique to polycrystalline metal/semiconductor interfaces have demonstrated an ability to spatially map both conduction band and valence band semiconductor structure. BEEM studies of epitaxial silicide/silicon interfaces have been particularly fruitful, as the rich silicide band structure results in complex and often surprising transport behavior...
Hecht, M. H.↗
Microstructure and Light-Emission in Stain-Etched Si subscript xGe subscript 1-x Alloys
N/A.
porous Si stain-etched alloys semiconductors↗