Gaevskii, A Yu

X-ray scattering from an irregular surface: Two-scale model

X-ray scattering from an irregular surface, which is described within a two-scale model, has been considered. A method for calculating the differential scattering cross section based on the quasi-classical Kirchhoff approximation is proposed. Coherent scattering from a lateral surface with a periodic motif is analyzed, and the reduction factor is calculated; the latter differs from the well-known expressions of the perturbation theory (first Born approximation, distorted-wave Born approximation). It is shown that the surface profile deviations from a periodic law, edge effects, and the interference of waves reflected from surface areas with different inclination angles significantly affect scattering from lateral structures.