Engineering topics

Gang Hu

Publications and source records attributed to Gang Hu.

3 records

NASA NTRS2025

Engineered Edge Effect Stress Redistribution in Suspended Thin Film Stacks for Flatness Control

This paper presents the systematic study of edge effect stresses and interaction between thin film stacks to achieve flat suspended thin film structures. Finite element modeling (FEM) was used for rapid analysis of support structures on microshutter array (MSA) shutter blades. The design application aims to flatten the blades to provide ultra-high contrast to optical detectors using MSAs as field masks. This is the first comprehensive study of microscopic surface feature edge effect and film-to-film stress interaction in micro electromechanical systems (MEMS). This study demonstrates flattening of thin film stacks by stress redistribution by induced shear force at the edge of strategically designed reinforcement structures.

Thin Film MEMS↗

NASA NTRS2024

Stress Control of Multilayer Suspended MEMS Structures In High Contrast Microshutters

The microshutter array (MSA) is a programmable field mask (Fig. 1) that enables large-format multi-object spectroscopy at extremely high contrast ratios of over 105 in space [1]. Assessment of the first generation MSAs used on the James Webb Space Telescope (JWST) revealed light leakage and stuck shutters due to warping (Fig. 2) [2]. Such leakage is partially reduced with appropriate light shields and mitigation strategies. Anticipation of stricter performance requirements for the upcoming Habitable Worlds Observatory Flagship [3] motivates the study. In this paper, we present the systematic study of film stress effects using finite element modeling (FEM) and analysis of newly fabricated MSAs. We present structural designs to mitigate stress effects and improve flatness of suspended structures in micro-electromechanical systems (MEMS). Our study aims to provide a comprehensive view of film-to-film interaction, mechanical, and structural considerations in design and process definition that goes beyond NGMSA devices. The presented findings can be of value to the stress and morphology control in any suspended MEMS membranes.

Microshutters↗

NASA NTRSDate not supplied

Characterizations of Optimized Microshutter Arrays for Space Borne Observatory Applications

We report the latest design, fabrication, and characterization result of the Next-Generation Microshutter Arrays (NGMSA) for space borne observatory applications. Our improved blade design aims to reduce the counter torque induced by the potential on the opposing wall to eliminate the torque bump, and thus enables pure electrostatic actuation for more reliable and stable microshutter operations. This paper presents the experimental performances of micro-fabricated microshutter arrays with varying design parameters and compares the results with simulation predictions.

Electrostatic↗