Engineering topics

Griesmann, U

Publications and source records attributed to Griesmann, U.

3 records

DOE OSTI2024

Binary pseudo-random array for calibration of interferometers with transmission spheres and cylinders

Binary pseudo-random array (BPRA) “white noise” artifacts are highly effective for characterizing the instrument transfer function (ITF) of surface topography metrology tools and wavefront measurement instruments. These BPRA artifacts feature all spatial frequencies within the instrument bandpass equally, resulting in a power spectral density with a white-noise-like character. This characteristic allows for direct ITF determination with uniform sensitivity across the entire spatial frequency range. We have developed a novel BPRA calibration standard that combines the diffractive pattern of a reflection computer-generated hologram (CGH) with the white noise generating BPRA pattern. By integrating these technologies using the same lithographic techniques, the resulting calibration sample enables ITF characterization of a Fizeau interferometer with a transmission sphere, or any nulling optic.

Munechika, K↗

DOE OSTI2023

Practical considerations in using a binary pseudorandom array for instrument transfer function calibration

Binary pseudo-random array (BPRA) artifacts are useful devices for calibrating the instrument transfer function (ITF) of interferometric microscopes and other optical and non-optical surface and wavefront measurement instruments. The intrinsic white noise character of the power spectral density function of the artifact simplifies the deconvolution of the ITF from the measured power spectral density (PSD). However, resampling of the BPRA intrinsic artifact features with the measurement tool's specific sampling pattern modifies the white noise character of the intrinsic spectrum and needs to be accounted for in the ITF-based data deconvolution process. We have developed an analytic solution to the spectrum of a resampled one- and two- dimensional BPRA. The resultant nominal PSD function is a simple twoparameter cosine function with a period equal to the resampled pixel width. A transfer function model for interferometric microscopes that incorporates this function, along with an ITF that includes aliasing effects and variable numerical aperture (NA), wavelength, and obscuration factor, is used to fit to the BPRA PSDs measured by an interference microscope for a range of objective and zoom lens magnification combinations.

Takacs, PZ↗

DOE OSTI2018

Characterization and operation optimization of large aperture optical interferometers using binary pseudorandom array test standards

Recently, a technique for calibration of the Modulation Transfer Function (MTF) of a broad variety of metrology instrumentation has been established. The technique is based on test samples structured according to binary pseudorandom (BPR) one-dimensional sequences and two-dimensional arrays. The inherent power spectral density of BPR gratings and arrays, has a deterministic white-noise-like character that allows a direct determination of the MTF with a uniform sensitivity over the entire spatial frequency range and field-of-view of an instrument. As such, the BPR samples satisfy the characteristics of a test standard: Functionality, ease of specification and fabrication, reproducibility, and low sensitivity to manufacturing error. Here we discuss our recent developments working with support of the U.S. Department of Energy on industrialization of the technique. The goal is to develop affordable BPR test samples, application procedures, and data processing software, suitable for thorough characterization of optical interferometers and microscopes, as well as x-ray, electron (scanning and transmission), and atomic force microscopes. We report on the development of BPR array test samples optimized for advanced characterization (including the instrumental MTF and aberrations) and operation optimization of large aperture optical interferometers. We describe the sample fabrication process and tests to verify the compliance to desired surface topography. The data acquisition and analysis procedures for application of the technique for precise focusing of Fizeau interferometer are discussed in detail.

Yashchuk, VV↗