Array of Energy Filters for Charged Particles Micromachines in <100> Silicon
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energy filters charged particles silicon↗
Engineering topics
Grunthaner, F. E.
Publications and source records attributed to Grunthaner, F. E..
Micromachined Array of Electrostatic Energy Analyzers for Charged Particles
The design, fabrication techniques and first test results of a new type of micromachined energy analyzer for charged particles are presented.
charged particles energy analyzer Bessel Box↗