Nuclear Non-proliferation / Nuclear and Radiological Sciences.
Abstract not provided.
Hertz, Kristin L.↗
Engineering topics
Hertz, Kristin L.
Publications and source records attributed to Hertz, Kristin L..
Integrated field emission array for ion desorption
An integrated field emission array for ion desorption includes an electrically conductive substrate; a dielectric layer lying over the electrically conductive substrate comprising a plurality of laterally separated cavities extending through the dielectric layer; a like plurality of conically-shaped emitter tips on posts, each emitter tip/post disposed concentrically within a laterally separated cavity and electrically contacting the substrate; and a gate electrode structure lying over the dielectric layer, including a like plurality of circular gate apertures, each gate aperture disposed concentrically above an emitter tip/post to provide a like plurality of annular gate electrodes and wherein the lower edge of each annular gate electrode proximate the like emitter tip/post is rounded. Also disclosed herein are methods for fabricating an integrated field emission array.
36 MATERIALS SCIENCE↗