SPUTTERING ION SOURCE FOR SOLIDS
Sputtering argon ion source used for analysis of solids provides more stable operation than a spark source and allows electrometric recording of the mass spectrum
MASS SPECTROSCOPY↗
Engineering topics
Publications and source records attributed to Herzog, F. K..
Sputtering argon ion source used for analysis of solids provides more stable operation than a spark source and allows electrometric recording of the mass spectrum