Design, characterization, and performance of a hard x-ray transmission microscope at the National Synchrotron Light Source II 18-ID beamline
A transmission X-ray microscope (TXM) has been designed and commissioned at the 18-ID Fullfield X-ray Imaging (FXI) beamline at the National Synchrotron Light Source-II (NSLS-II). This instrument operates in the 5-11 keV range, and, with the current set of optics, is capable of 30 nm spatial resolution imaging, with a field of view (FOV) of about 40 microns. For absorption contrast, the minimum exposure time for a single projection image is about 20 ms and an entire 3D tomography data set can be acquired in under one minute. The system enables tomographic reconstructions with sub-50 nm spatial resolution without the use of markers on the sample or corrections for rotation run-outs.
77 NANOSCIENCE AND NANOTECHNOLOGY↗