Laser-induced patterning for a diffraction grating using the phase change material of Ge 2 Sb 2 Te 5 (GST) as a spatial light modulator in X-ray optics: a proof of concept
The proposed X-ray spatial light modulator (SLM) concept is based on the difference of X-ray scattering from amorphous and crystalline regions of phase change materials (PCMs) such as Ge 2 Sb 2 Te 5 (GST). In our X-ray SLM design, the “ on” and “ off” states correspond to a patterned and homogeneous state of a GST thin film, respectively. The patterned state is obtained by exposing the homogeneous film to laser pulses. In this paper, we present patterning results in GST thin films characterized by microwave impedance microscopy and X-ray small-angle scattering at the Stanford Synchrotron Radiation Lightsource.
36 MATERIALS SCIENCE↗