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Kelly, D.

Publications and source records attributed to Kelly, D..

Design and Fabrication of Electrostatically Actuated Silicon Microshutters Arrays

We have developed a new fabrication process to actuate microshutter arrays (MSA) electrostatically at NASA Goddard Space Flight Center. The microshutters are fabricated on silicon with thin silicon nitride membranes. A pixel size of each microshutter is 100 x 200 micrometers 2. The microshutters rotate 90 degrees on torsion bars. The selected microshutters are actuated, held, and addressed electrostatically by applying voltages on the electrodes the front and back sides of the microshutters. The atomic layer deposition (ALD) of aluminum oxide was used to insulate electrodes on the back side of walls; the insulation can withstand over 100 V. The ALD aluminum oxide is dry etched, and then the microshutters are released in vapor HF.

microshutter arrays

Fabrication of Electrostatically Actuated Microshutters Arrays

A new fabrication process has been developed to actuate microshutter arrays (MSA) electrostatically at NASA Goddard Space Flight Center. The microshutters, made with silicon nitride membranes with a pixel size of 100 x 200 sq microns, rotate on torsion bars. The microshutters are actuated, latched, and addressed electrostatically by applying voltages on the electrodes the front and back sides of the microshutters. The atomic layer deposition (ALD) of aluminum oxide was used to insulate electrodes on the back side of walls; the insulation can withstand over 100 V. The ALD aluminum oxide is dry etched, and then the microshutters are released in vapor HF.

microshutter arrays (MSA)

Development of a 2K x 2K GaAs QWIP Focal Plane Array

We are developing the next generation of GaAs Quantum Well Infrared Photodetector (QWIP) focal plane arrays (FPAs) in preparation for future NASA space-borne Earth observing missions. It is anticipated that these missions will require both wider ground spatial coverage as well as higher ground imaging resolution. In order to demonstrate our capability in meeting these future goals we have taken a two-tiered approach in the next stage of advanced QWIP focal plane array development. We will describe our progress in the development of a 512 x 3,200 (512 x 3K) array format for this next generation thermal imaging array for the NASA Landsat project. However, there currently is no existing readout integrated circuit (ROIC) for this format array.so to demonstrate the ability to scale-up an existing ROIC we developed a 1,920 x 2,048 (2K x 2K) array and it hybridized to a Raytheon SB419 CTIA readout integrated circuit that was scaled up from their existing 512 x 640 SB339 ROIC. Two versions of the 512 x 3K QWIP array were fabricated to accommodate a future design scale-up of both the Indigo 9803 ROIC based on a 25 micron pixel dimension and a scale up of the Indigo 9705 ROIC based on a 30 micron pixel dimension. Neither readout for the 512 x 3K has yet to be developed but we have fabricated both versions of the array. We describe the design, development and test results of this effort as well as the specific applications these FPAs are intended to address.

Jhabvala, M.

Magnetically Coupled Microcalorimeters

Magnetic calorimeters have been under development for over 20 years targeting a wide variety of different applications that require very high resolution spectroscopy. They have a number of properties that distinguish them from other 10w temperature detectors. In this paper we review these properties and emphasize the types of application to which they are most suited. We will describe what has been learned about the best materials, geometries, and read-out amplifiers and our understanding of the measured performance and theoretical limits. While most magnetic calorimeter research has concentrated on the use of paramagnets to provide the temperature sensitivity, recently magnetically coupled microcalorimeters have been in development that utilize the diamagnetic response of superconductors. We will contrast some of the properties of the two different magnetic sensor types.

Bandler, S. R.

Performance and Characterization of Magnetic Penetration Thermometer Devices for X-Ray Spectroscopy

We are developing magnetic penetration thermometers (MPTs) for applications in X-ray astronomy. These non-dissipative devices consist of an X-ray absorber in good thermal contact to a superconducting thin film with a transition temperature around T=100mK. A microfabricated superconducting planar inductor underneath is used to store a persistent current and couple the superconductor's diamagnetic response to a readout SQUID. The strong temperature dependence of the diamagnetic response make these devices suitable for highly sensitive macroscopic thermometers that are capable of achieving very high energy resolution. We present results achieved with MPTs consisting of MoAu bilayer sensors attached to overhanging square 250 micron by 250 micron gold absorbers that have demonstrated an energy resolution of delta E_FWHM=2.3eV at an X-ray energy of 5.9keV. A similar device has shown delta E_FWHM=2.0eV at 1.5 keV. Under certain conditions and for specific device geometries, the temperature responsivity of the MPTs can vary on long timescales degrading the spectral performance. We present the characterization of different inductor geometries to optimize the design for the highest possible temperature sensitivity and compare different device designs with respect to responsivity stability.

Porst, J. -P.

JPKWIC - General key word in context and subject index report generator

JPKWIC computer program is a general key word in context and subject index report generator specifically developed to help nonprogrammers and nontechnical personnel to use the computer to access files, libraries and mass documentation. This program is designed to produce a KWIC index, a subject index, an edit report, a summary report, and an exclusion list.

Jirka, R.