Engineering topics
Publications and source records attributed to Lombardi, Frank.
Sleeve protects instrument from low frequency vibrations and helps maintain clean atmosphere for semiconductor analysis. Flexible sleeve joins glove box to specimen-introduction port of instrument chamber. Coupling made of brown nylon with inner layer of white rubber, attached to both areas with specially designed clamps. Thickness of sleeve material 0.01 in.
Simple, inexpensive apparatus coats semiconductor wafers uniformly with hydrofluoric acid for etching. Apparatus made in part from small commercial electric-fan motor. Features bowl that collects acid. Silicon wafer placed on platform and centered on axis; motor switched on. As wafer spins, drops of hydrofluoric acid applied from syringe. Centrifugal force spreads acid across wafer in fairly uniform sheet.