Engineering topics

Marley, J.

Publications and source records attributed to Marley, J..

3 records

NASA NTRS1993

Fabrication of micro-optical devices

We have fabricated a variety of micro-optic components including Fresnel and non-Frensel lenses, off-axis and dispersive lenses with binary stepped contours, and analog contours. Process details for all lens designs fabricated are given including multistep photolithography for binary fabrication and grayscale mask photolithography for analog fabrication. Reactive ion etching and ion beam milling are described for the binary fabrication process, while ion beam milling was used for the analog fabrication process. Examples of micro-optic components fabricated in both Si and CdTe substrates are given.

Anderson, W. W.↗

NASA NTRS1970

Improved beam-lead interconnection structure for uncased integrated circuit chips

Interconnection structure eliminates several levels of manually made interconnections and shortens the path lengths from generator to load, permitting reduction in consumed power.

Marley, J.↗

NASA NTRS1969

Leads integral with the internal interconnection that penetrate the molded wall of a package

Multiplicity of external ribbon leads makes possible connections to a sealed or encapsulated microassembly. The leads are integral with the internal connections on a single part that can be fabricated economically by fine-detail electroplating.

Marley, J.↗