Mayer, A. | Search NASA

NASA NTRS1980

Development of megasonic cleaning for silicon wafers

A cleaning and drying system for processing at least 2500 three in. diameter wafers per hour was developed with a reduction in process cost. The system consists of an ammonia hydrogen peroxide bath in which both surfaces of 3/32 in. spaced, ion implanted wafers are cleaned in quartz carriers moved on a belt past two pairs of megasonic transducers. The wafers are dried in the novel room temperature, high velocity air dryer in the same carriers used for annealing. A new laser scanner was used effectively to monitor the cleaning ability on a sampling basis.

Mayer, A.↗

NASA NTRS1971

Target contrast considerations in millimeter wave radiometry for airborne navigation

Target signal requirements for aircraft navigation systems that use radiometric receivers which map thermally emitted power radiated by terrain or power radiated by ground-based beacons are discussed. For selected millimeter wavelength bands, microwaves suffer relatively little degradation by absorption or scattering on passage through the atmosphere, despite extreme weather variations. Interest centers on 8-millimeter waves because of component availability, portability (small size), high image resolution, and all-weather capability at this wavelength. The idea of radiometric airborne navigation is introduced. Elements of radiometry, terrain radiation, and atmospheric transmission characteristics are reviewed. Data pertaining to these elements at 8 mm wavelength are collected. Calculation of radiometric contrasts is discussed for some simple models of terrain targets.

Mayer, A.↗