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Meng-Ping Chang

Publications and source records attributed to Meng-Ping Chang.

4 records
All sourcesNASA NTRSDOE OSTI
NASA NTRS2025

Engineered Edge Effect Stress Redistribution in Suspended Thin Film Stacks for Flatness Control

This paper presents the systematic study of edge effect stresses and interaction between thin film stacks to achieve flat suspended thin film structures. Finite element modeling (FEM) was used for rapid analysis of support structures on microshutter array (MSA) shutter blades. The design application aims to flatten the blades to provide ultra-high contrast to optical detectors using MSAs as field masks. This is the first comprehensive study of microscopic surface feature edge effect and film-to-film stress interaction in micro electromechanical systems (MEMS). This study demonstrates flattening of thin film stacks by stress redistribution by induced shear force at the edge of strategically designed reinforcement structures.

Thin Film MEMS↗
NASA NTRS2024

Stress Control of Multilayer Suspended MEMS Structures In High Contrast Microshutters

The microshutter array (MSA) is a programmable field mask (Fig. 1) that enables large-format multi-object spectroscopy at extremely high contrast ratios of over 105 in space [1]. Assessment of the first generation MSAs used on the James Webb Space Telescope (JWST) revealed light leakage and stuck shutters due to warping (Fig. 2) [2]. Such leakage is partially reduced with appropriate light shields and mitigation strategies. Anticipation of stricter performance requirements for the upcoming Habitable Worlds Observatory Flagship [3] motivates the study. In this paper, we present the systematic study of film stress effects using finite element modeling (FEM) and analysis of newly fabricated MSAs. We present structural designs to mitigate stress effects and improve flatness of suspended structures in micro-electromechanical systems (MEMS). Our study aims to provide a comprehensive view of film-to-film interaction, mechanical, and structural considerations in design and process definition that goes beyond NGMSA devices. The presented findings can be of value to the stress and morphology control in any suspended MEMS membranes.

Microshutters↗
NASA NTRSDate not supplied

Technological Developments of NexGen Micro-Shutter Array (NGMSA) for the Future Habitable Worlds Observatory (HWO) Flagship Mission

We present the most up to date advancements in production, design, and performance of the NexGen Micro-Shutter Array (NGMSA) for Multi-object Spectroscopy (MOS), intended for the future Habitable Worlds Observatory (HWO) Flagship. A microshutter array functions as a programmable slit mask, to generate slits corresponding to sparsely distributed sources in the field of view of a telescope. In contrast to the magnetic/electrostatic microshutter arrays used in the James Webb Space Telescope (JWST), the NGMSA is fully operated by electrostatics, simplifying overall system. Our small pilot array proved its capability from FORTIS sounding rocket mission in 2019. As we are switching to a larger HWO flight size array process, we encounter multiple processing related issues. Also, there has been individual shutter level issue that impairs operation and performance. We will discuss those problems and strategies to overcome the challenges to achieve an on/off contrast of >1e5 with near 100% shutter operability.

Microshutter↗