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Menk, Lyle Alexander

Publications and source records attributed to Menk, Lyle Alexander.

Mathematics of Gas Ingress of Hermetic Packages

Herein, we have derived a gas ingress and egress equation from the first principles of ideal gases. This work is intended to benefit the hermetic microelectronics packaging community, but it may be applied to other fields that require a deep understanding of gas ingress and egress dynamics. The equation outlined herein encompasses package material properties, package characteristics, hermetic testing conditions, and service conditions. It serves as a practical utility for calculating package pressure changes due to gas ingress and egress and, therefore, a power tool for component and system service life predictions.

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On Gas Ingression of Hermetic Packages

In this paper, a closed-form mathematic equation that governs gas ingression of hermetic packages is derived from first principles and applied to moist air and water vapor ingression conditions. The equation models internal gas partial pressure change as a function of time, external conditions, and package characteristics. The equation provides the theoretical basis for direct comparisons of ingression behaviors of different gases into hermetic packages. Comparing the rates of internal air pressure increase due to air ingression and water vapor partial pressure buildup due to water vapor ingression, the authors theorize that vacuum decay may present a greater challenge to the performance of microelectromechanical systems (MEMS) devices within hermetic packages than that of water vapor content induced corrosion failures. Furthermore, this paper also examines gas ingression of hermetic enclosures with multiple layers of seals.

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