Engineering topics
Publications and source records attributed to Micka, E. Z..
A system for automatically inspecting an integrated circuit was developed. A device for shining a scanning narrow light beam at an integrated circuit to be inspected and another light beam at an accepted integrated circuit was included. A pair of photodetectors that receive light reflected from these integrated circuits, and a comparing system compares the outputs of the photodetectors.
This invention provides a method for automatically inspecting the surface of an object, such as an integrated circuit chip, whereby the data obtained by the light reflected from the surface, caused by a scanning light beam, is automatically compared with data representing acceptable values for each unique surface. A signal output provided indicated of acceptance or rejection of the chip. Acceptance is based on predetermined statistical confidence intervals calculated from known good regions of the object being tested, or their representative values. The method can utilize a known good chip, a photographic mask from which the I.C. was fabricated, or a computer stored replica of each pattern being tested.
Sodium niobate, formed by high vacuum, flash, and reactive evaporations, has a high dielectric constant and is used as a thin film dielectric in microelectronic capacitors. High purity films are formed from relatively inexpensive, pure starting materials. Crystalline sodium niobate films can be formed on amorphous or crystalline materials.