Determination of the Electron Temperature in a Low Pressure Dusty Radiofrequency Methane Plasma
The particles are obtained by PECVD in radiofrequency (13.56 MHz) low pressure plasmas (90%CH4-10%Ar). During the particle growth, the particles trap electrons and modify the EEDF, and the electrical and optical characteristics of the plasma. The plasma is analyzed by Optical Emission Spectroscopy. The excitation temperature and the electron temperature are calculated from the H{sub {alpha}}, H{sub {beta}}, H{sub {gamma}} Balmer hydrogen line intensities and from Ar ones. The temporal evolutions of the temperatures during the particle formation are compared and discussed.