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Engineering topics

Miller, Eric

Publications and source records attributed to Miller, Eric.

Future of plasma etching for microelectronics: Challenges and opportunities

Plasma etching is an essential semiconductor manufacturing technology required to enable the current microelectronics industry. Along with lithographic patterning, thin-film formation methods, and others, plasma etching has dynamically evolved to meet the exponentially growing demands of the microelectronics industry that enables modern society. At this time, plasma etching faces a period of unprecedented changes owing to numerous factors, including aggressive transition to three-dimensional (3D) device architectures, process precision approaching atomic-scale critical dimensions, introduction of new materials, fundamental silicon device limits, and parallel evolution of post-CMOS approaches. The vast growth of the microelectronics industry has emphasized its role in addressing major societal challenges, including questions on the sustainability of the associated energy use, semiconductor manufacturing related emissions of greenhouse gases, and others. The goal of this article is to help both define the challenges for plasma etching and point out effective plasma etching technology options that may play essential roles in defining microelectronics manufacturing in the future. The challenges are accompanied by significant new opportunities, including integrating experiments with various computational approaches such as machine learning/artificial intelligence and progress in computational approaches, including the realization of digital twins of physical etch chambers through hybrid/coupled models. These prospects can enable innovative solutions to problems that were not available during the past 50 years of plasma etch development in the microelectronics industry. To elaborate on these perspectives, the present article brings together the views of various experts on the different topics that will shape plasma etching for microelectronics manufacturing of the future.

Engineering↗

Delivering Clean Air in Denver: Propane Trucks and Infrastructure in Mail Delivery Application

In 2021, Drive Clean Colorado, a Denver-based Clean Cities coalition, initiated the deployment of five Class 6 medium-duty propane autogas delivery trucks into a United States Postal Service (USPS) mail delivery contractor fleet with the goal of providing a proof-of-concept demonstration for mail delivery fleets nationwide. Funded by the U.S. Department of Energy's Office of Energy Efficiency & Renewable Energy, the project, titled "Delivering Clean Air in Denver: Propane Trucks and Infrastructure in Mail Delivery Application," enabled the purchase and deployment of the propane-powered trucks, refueling infrastructure, and supporting analysis by the National Renewable Energy Laboratory (NREL). Key objectives of the analysis included calculating the propane vehicles' emissions reductions, analyzing the costs and operational performance of the propane fleet compared to conventional diesel-powered vehicles, and evaluating the viability of propane as a clean and cost-effective alternative to conventional diesel trucks (AFDC 2023b, 2023c). The primary goal of the project was to demonstrate alternative fuel vehicles in a mail transport application and evaluate the viability of propane as a clean and cost-effective alternative to conventional diesel trucks. This proof-of-concept demonstration is expected to lead to improved understanding of the performance attributes, costs, and operational issues to inform technology adoption decisions, helping to spur market transformation toward lower-emission truck fleets. By reducing the risk of first adoption, potential exists to transform the U.S. Postal Service (USPS) mail delivery system into a lower-carbon national fleet. This technical report details the vehicle duty cycle characterization and fleet cost and performance comparison performed by the National Renewable Energy Laboratory, in addition to estimated emissions reductions for delivery operations.

33 ADVANCED PROPULSION SYSTEMS↗

Federal Aviation Administration Vertiport Electrical Infrastructure Study

In this detailed analysis, the authors assess the charging infrastructure needed for the deployment of advanced air mobility involving electrified vertical take-off and landing technologies. The report covers four research areas: (1) Identifying charging infrastructure requirements for existing facilities based on flight operational parameters, potential use cases, charging strategy, and other constraints. (2) Assessing sites on power availability to meet charging demand, the impact on grid infrastructure, potential hazards, and cybersecurity needs, and using technoeconomic analysis to identify opportunities for onsite distributed energy resources, primarily solar photovoltaics and battery energy storage systems. (3) Calculating greenhouse gas emission based on total energy consumption attributable to each site. (4) Analyzing the job and economic development impact for sites adopting new infrastructure.

29 ENERGY PLANNING, POLICY, AND ECONOMY↗

Searching for the 3.5 keV Line in the Stacked Suzaku Observations of Galaxy Clusters

We perform a detailed study of the stacked Suzaku observations of 47 galaxy clusters, spanning a redshift range of 0.01-0.45, to search for the unidentified 3.5 keV line. This sample provides an independent test for the previously detected line. We detect a 2sigma-significant spectral feature at 3.5 keV in the spectrum of the full sample. When the sample is divided into two subsamples (cool-core and non-cool core clusters), the cool-core subsample shows no statistically significant positive residuals at the line energy. A very weak (approx. 2sigma confidence) spectral feature at 3.5 keV is permitted by the data from the non-cool-core clusters sample. The upper limit on a neutrino decay mixing angle of sin(sup 2)(2theta) = 6.1 x 10(exp -11) from the full Suzaku sample is consistent with the previous detections in the stacked XMM-Newton sample of galaxy clusters (which had a higher statistical sensitivity to faint lines), M31, and Galactic center, at a 90% confidence level. However, the constraint from the present sample, which does not include the Perseus cluster, is in tension with previously reported line flux observed in the core of the Perseus cluster with XMM-Newton and Suzaku.

dark matter↗

Radial Profile of the 3.5 kev Line Out to R200 in the Perseus Cluster

The recent discovery of the unidentified emission line at 3.5 keV in galaxies and clusters has attracted great interest from the community. As the origin of the line remains uncertain, we study the surface brightness distribution of the line in the Perseus cluster since that information can be used to identify its origin. We examine the flux distribution of the 3.5 keV line in the deep Suzaku observations of the Perseus cluster in detail. The 3.5 keV line is observed in three concentric annuli in the central observations, although the observations of the outskirts of the cluster did not reveal such a signal. We establish that these detections and the upper limits from the non-detections are consistent with a dark matter decay origin. However, absence of positive detection in the outskirts is also consistent with some unknown astrophysical origin of the line in the dense gas of the Perseus core, as well as with a dark matter origin with a steeper dependence on mass than the dark matter decay. We also comment on several recently published analyses of the 3.5 keV line.

dark matter – elementary particles – galaxies:↗

Strain Gage Loads Calibration Testing with Airbag Support for the Gulfstream III SubsoniC Research Aircraft Testbed (SCRAT)

This paper describes the design and conduct of the strain gage load calibration ground test of the SubsoniC Research Aircraft Testbed, Gulfstream III aircraft, and the subsequent data analysis and its results. The goal of this effort was to create and validate multi-gage load equations for shear force, bending moment, and torque for two wing measurement stations. For some of the testing the aircraft was supported by three air bags in order to isolate the wing structure from extraneous load inputs through the main landing gear. Thirty-two strain gage bridges were installed on the left wing. Hydraulic loads were applied to the wing lower surface through a total of 16 load zones. Some dead weight load cases were applied to the upper wing surface using shot bags. Maximum applied loads reached 54,000 pounds.

trailing edge flap↗

Autonomous Satellite Operations Via Secure Virtual Mission Operations Center

The science community is interested in improving their ability to respond to rapidly evolving, transient phenomena via autonomous rapid reconfiguration, which derives from the ability to assemble separate but collaborating sensors and data forecasting systems to meet a broad range of research and application needs. Current satellite systems typically require human intervention to respond to triggers from dissimilar sensor systems. Additionally, satellite ground services often need to be coordinated days or weeks in advance. Finally, the boundaries between the various sensor systems that make up such a Sensor Web are defined by such things as link delay and connectivity, data and error rate asymmetry, data reliability, quality of service provisions, and trust, complicating autonomous operations. Over the past ten years, researchers from the NASA Glenn Research Center (GRC), General Dynamics, Surrey Satellite Technology Limited (SSTL), Cisco, Universal Space Networks (USN), the U.S. Geological Survey (USGS), the Naval Research Laboratory, the DoD Operationally Responsive Space (ORS) Office, and others have worked collaboratively to develop a virtual mission operations capability. Called VMOC (Virtual Mission Operations Center), this new capability allows cross-system queuing of dissimilar mission unique systems through the use of a common security scheme and published application programming interfaces (APIs). Collaborative VMOC demonstrations over the last several years have supported the standardization of spacecraft to ground interfaces needed to reduce costs, maximize space effects to the user, and allow the generation of new tactics, techniques and procedures that lead to responsive space employment.

Miller, Eric↗

Virtual Mission Operations of Remote Sensors With Rapid Access To and From Space

This paper describes network-centric operations, where a virtual mission operations center autonomously receives sensor triggers, and schedules space and ground assets using Internet-based technologies and service-oriented architectures. For proof-of-concept purposes, sensor triggers are received from the United States Geological Survey (USGS) to determine targets for space-based sensors. The Surrey Satellite Technology Limited (SSTL) Disaster Monitoring Constellation satellite, the United Kingdom Disaster Monitoring Constellation (UK-DMC), is used as the space-based sensor. The UK-DMC s availability is determined via machine-to-machine communications using SSTL s mission planning system. Access to/from the UK-DMC for tasking and sensor data is via SSTL s and Universal Space Network s (USN) ground assets. The availability and scheduling of USN s assets can also be performed autonomously via machine-to-machine communications. All communication, both on the ground and between ground and space, uses open Internet standards.

Ivancic, William D.↗

Secure, Network-Centric Operations of a Space-Based Asset: Cisco Router in Low Earth Orbit (CLEO) and Virtual Mission Operations Center (VMOC)

This report documents the design of network infrastructure to support operations demonstrating the concept of network-centric operations and command and control of space-based assets. These demonstrations showcase major elements of the Transformal Communication Architecture (TCA), using Internet Protocol (IP) technology. These demonstrations also rely on IP technology to perform the functions outlined in the Consultative Committee for Space Data Systems (CCSDS) Space Link Extension (SLE) document. A key element of these demonstrations was the ability to securely use networks and infrastructure owned and/or controlled by various parties. This is a sanitized technical report for public release. There is a companion report available to a limited audience. The companion report contains detailed networking addresses and other sensitive material and is available directly from William Ivancic at Glenn Research Center.

Ivancic, William↗