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NASA NTRS2016

Interferometer with Continuously Varying Path Length Measured in Wavelengths to the Reference Mirror

An interferometer in which the path length of the reference beam, measured in wavelengths, is continuously changing in sinusoidal fashion and the interference signal created by combining the measurement beam and the reference beam is processed in real time to obtain the physical distance along the measurement beam between the measured surface and a spatial reference frame such as the beam splitter. The processing involves analyzing the Fourier series of the intensity signal at one or more optical detectors in real time and using the time-domain multi-frequency harmonic signals to extract the phase information independently at each pixel position of one or more optical detectors and converting the phase information to distance information.

Ohara, Tetsuo↗

NASA NTRS2012

High-Speed Scanning Interferometer Using CMOS Image Sensor and FPGA Based on Multifrequency Phase-Tracking Detection

A sub-aperture stitching optical interferometer can provide a cost-effective solution for an in situ metrology tool for large optics; however, the currently available technologies are not suitable for high-speed and real-time continuous scan. NanoWave s SPPE (Scanning Probe Position Encoder) has been proven to exhibit excellent stability and sub-nanometer precision with a large dynamic range. This same technology can transform many optical interferometers into real-time subnanometer precision tools with only minor modification. The proposed field-programmable gate array (FPGA) signal processing concept, coupled with a new-generation, high-speed, mega-pixel CMOS (complementary metal-oxide semiconductor) image sensor, enables high speed (>1 m/s) and real-time continuous surface profiling that is insensitive to variation of pixel sensitivity and/or optical transmission/reflection. This is especially useful for large optics surface profiling.

Ohara, Tetsuo↗