Development of a precision, wide-dynamic-range actuator for use in active optical systems
The design, operation, and performance of a wide-dynamic-range optical-quality actuator are discussed. The actuator uses a closed-loop control system to maintain accurate positioning and has an rms noise performance of 20 nm. A unique force offloading mechanism allows the actuator coil to dissipate less than 3 mW under quiescent conditions. The operation of an experimental segmented optical system that uses 18 of the actuators is examined to show how they are integrated into an actual system.
Lorell, K. R.↗