DOE OSTI2016
Here, the synthesis of molybdenum oxo-amidinate complexes MoO 2 (R 2 AMD) 2 [AMD = N,N'-di-R-acetamidinate; R = Cy (2; cyclohexyl) and iPr (3)], and their characterization by 1 H, 13 C NMR, X-ray diffraction, and thermogravimetric analysis is reported. Quartz-crystal microbalance and X-ray photoelectron spectroscopic studies confirm that 3 is an improved ALD precursor versus the R = t-butyl derivative for MoO 3 film growth. Complex 3 is accessible in higher yields (80%+), is easier to handle without mass loss, and in conjunction with O 3 as the second ALD reagent, yields nitride-free MoO 3 films.
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗