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DOE OSTI2022

FY2023 Site Sustainability Plan

The Sandia National Laboratories site sustainability plan and its associated DOE Sustainability Dashboard data entries encompass Sandia National Laboratories contributions toward meeting the DOE sustainability goals. This site sustainability plan fulfills the contractual requirement for National Technology & Engineering Solutions of Sandia, LLC, the management and operating contractor for Sandia National Laboratories, to deliver an annual sustainability plan to the DOE National Nuclear Security Administration Sandia Field Office.

54 ENVIRONMENTAL SCIENCES↗

DOE OSTI2022

Compact instantaneous phase-shifting Sagnac interferometer for nanoscale tilt measurement

There is a large inter disciplinary need for high precision angular sensors in state-of-the-art technologies. This particularly applies to optical metrology in the field of Extreme Ultraviolet (EUV) or X-ray where the optics are commonly characterized in terms of slope errors at a nanoradian scale level. Here, in this paper, we present the in-lab development of an angular sensor based on a single reflection compact Sagnac interferometer using instantaneous phase shifting. Our automated prototype and first results show less than 15 nrad RMS repeatability, at least 200 nrad sensitivity and 280 nrad reproducibility over 100 μrad angular range.

36 MATERIALS SCIENCE↗