Independent Electron and Ion Energy Distribution Control for Semiconductor Processing Phase I Final Technical Report
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70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
Engineering topics
Prager, James
Publications and source records attributed to Prager, James.
Improving Ion Control for Semiconductor Processing with Repetitive Pulsed Power - Phase II Final Technical Report
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70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
High Voltage Pulse Generator for High-Energy Beam Kickers Final Technical Report
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43 PARTICLE ACCELERATORS↗