Search NASA⌕ Search

Engineering topics

Sharma, Surendra P.

Publications and source records attributed to Sharma, Surendra P..

At least 19 records
All sourcesNASA NTRSDOE OSTI
NASA NTRS2001

Detection of Chamber Conditioning Through Optical Emission and Impedance Measurements

During oxide etch processes, buildup of fluorocarbon residues on reactor sidewalls can cause run-to-run drift and will necessitate some time for conditioning and seasoning of the reactor. Though diagnostics can be applied to study and understand these phenomena, many of them are not practical for use in an industrial reactor. For instance, measurements of ion fluxes and energy by mass spectrometry show that the buildup of insulating fluorocarbon films on the reactor surface will cause a shift in both ion energy and current in an argon plasma. However, such a device cannot be easily integrated into a processing system. The shift in ion energy and flux will be accompanied by an increase in the capacitance of the plasma sheath. The shift in sheath capacitance can be easily measured by a common commercially available impedance probe placed on the inductive coil. A buildup of film on the chamber wall is expected to affect the production of fluorocarbon radicals, and thus the presence of such species in the optical emission spectrum of the plasma can be monitored as well. These two techniques are employed on a GEC (Gaseous Electronics Conference) Reference Cell to assess the validity of optical emission and impedance monitoring as a metric of chamber conditioning. These techniques are applied to experimental runs with CHF3 and CHF3/O2/Ar plasmas, with intermediate monitoring of pure argon plasmas as a reference case for chamber conditions.

Cruden, Brett A.↗
NASA NTRS2001

Neutral Gas Temperature Estimates in an Inductively Coupled CF4 Plasma by Fitting Diatomic Emission Spectra

This work examines the accuracy of plasma neutral temperature estimates by fitting the rotational band envelope of different diatomic species in emission. Experiments are performed in an inductively coupled CF4 plasma generated in a Gaseous Electronics Conference reference cell. Visible and ultraviolet emission spectra are collected at a power of 300 W (approximately 0.7 W/cc) and pressure of 30 mtorr. The emission bands of several molecules (CF, CN, C2, CO, and SiF) are fit simultaneously for rotational and vibrational temperatures and compared. Four different rotational temperatures are obtained: 1250 K for CF and CN, 1600 K for CO, 1800 K for C2, and 2300 K for SiF. The vibrational temperatures obtained vary from 1750-5950 K, with the higher vibrational temperatures generally corresponding to the lower rotational temperatures. These results suggest that the different species have achieved different degrees of equilibration between the rotational and vibrational modes and may not be equilibrated with the translational temperatures. The different temperatures are also related to the likelihood that the species are produced by ion bombardment of the surface, with etch products like SiF, CO, and C2 having higher temperatures than species expected to have formed in the gas phase.

Cruden, Brett A.↗
NASA NTRS2001

The Importance of Optical Pathlength Control for Plasma Absorption Measurements

An inductively coupled GEC Cell with modified viewing ports has been used to measure in-situ absorption in CF4 plasmas via Fourier Transform Infrared Spectroscopy, and the results compared to those obtained in a standard viewport configuration. The viewing ports were modified so that the window boundary is inside, rather than outside, of the GEC cell. Because the absorption obtained is a spatially integrated absorption, measurements made represent an averaging of absorbing species inside and outside of the plasma. This modification is made to reduce this spatial averaging and thus allow a more accurate estimation of neutral species concentrations and temperatures within the plasmas. By reducing this pathlength, we find that the apparent CF4 consumption increases from 65% to 95% and the apparent vibrational temperature of CF4 rises by 50-75 K. The apparent fraction of etch product SiF4 decreases from 4% to 2%. The data suggests that these density changes may be due to significant temperature gradients between the plasma and chamber viewports.

Cruden, Brett A.↗
NASA NTRS1996

Atomic Resonance Radiation Energetics Investigation as a Diagnostic Method for Non-Equilibrium Hypervelocity Flows

Absorption measurements with a tunable vacuum ultraviolet light source have been proposed as a concentration diagnostic for atomic oxygen, and the viability of this technique is assessed in light of recent measurements. The instrumentation, as well as initial calibration measurements, have been reported previously. We report here additional calibration measurements performed to study the resonance broadening line shape for atomic oxygen. The application of this diagnostic is evaluated by considering the range of suitable test conditions and requirements, and by identifying issues that remain to be addressed.

Meyer, Scott A.↗
NASA NTRS1996

A Detailed Level Kinetics Model of NO Vibrational Energy Distributions

Several contemporary problems have pointed to the desirability of a detailed level kinetics approach to modeling the distribution of vibrational energy in NO. Such a model is necessary when vibrational redistribution reactions are insufficient to maintain a Boltzmann distribution over the vibrational energy states. Recent calculations of the rate constant for the first reaction of the Zeldovich mechanism (N2 + O (goes to) NO + N) have suggested that the product NO is formed in high vibrational states. In shock layer flowfields, the product NO molecules may experience an insufficient number of collisions to establish a Boltzmann distribution over vibrational states, thus necessitating a level kinetics model. In other flows, such as expansions of high temperature air, fast, near-resonance vibrational energy exchanges with N2 and O2 may also require a level specific model for NO because of the relative rates of vibrational exchange and redistribution. The proposed report will integrate computational and experimental components to construct such a model for the NO molecule.

Sharma, Surendra P.↗
NASA NTRS1996

On Kinetics Modeling of Vibrational Energy Transfer

Two models of vibrational energy exchange are compared at equilibrium to the elementary vibrational exchange reaction for a binary mixture. The first model, non-linear in the species vibrational energies, was derived by Schwartz, Slawsky, and Herzfeld (SSH) by considering the detailed kinetics of vibrational energy levels. This model recovers the result demanded at equilibrium by the elementary reaction. The second model is more recent, and is gaining use in certain areas of computational fluid dynamics. This model, linear in the species vibrational energies, is shown not to recover the required equilibrium result. Further, this more recent model is inconsistent with its suggested rate constants in that those rate constants were inferred from measurements by using the SSH model to reduce the data. The non-linear versus linear nature of these two models can lead to significant differences in vibrational energy coupling. Use of the contemporary model may lead to significant misconceptions, especially when integrated in computer codes considering multiple energy coupling mechanisms.

Gilmore, John O.↗
NASA NTRS1995

Computations of Axisymmetric Flows in Hypersonic Shock Tubes

A time-accurate two-dimensional fluid code is used to compute test times in shock tubes operated at supersonic speeds. Unlike previous studies, this investigation resolves the finer temporal details of the shock-tube flow by making use of modern supercomputers and state-of-the-art computational fluid dynamic solution techniques. The code, besides solving the time-dependent fluid equations, also accounts for the finite rate chemistry in the hypersonic environment. The flowfield solutions are used to estimate relevant shock-tube parameters for laminar flow, such as test times, and to predict density and velocity profiles. Boundary-layer parameters such as bar-delta(sub u), bar-delta(sup *), and bar-tau(sub w), and test time parameters such as bar-tau and particle time of flight t(sub f), are computed and compared with those evaluated by using Mirels' correlations. This article then discusses in detail the effects of flow nonuniformities on particle time-of-flight behind the normal shock and, consequently, on the interpretation of shock-tube data. This article concludes that for accurate interpretation of shock-tube data, a detailed analysis of flowfield parameters, using a computer code such as used in this study, must be performed.

Sharma, Surendra P.↗
NASA NTRS1995

Arcjets for Aerodynamic and Materials Testing: Flow Characterization

Potential use of Arcjets as a hypersonic ground test facility for aerodynamic testing of future space vehicles is examined. Since high fidelity simulation of flight freestream conditions is a basic requirement for any useful ground test facility, it is imperative that the Arcjet flow field be thoroughly investigated in a systematic and orderly manner. At the same time we must know how and to what extent an inaccurate simulation of the flight freestream will effect the test data. The paper after discussing these two topics, describes various experimental techniques for Arcjet flow characterization. Results from an on-going Arcjet flow characterization program are also presented.

Sharma, Surendra P.↗
NASA NTRS1995

Vibrational Energy Coupling in Expanding N2/O2/NO Admixtures

Recent direct measurements of N2 and O2 vibrational populations in expansions of synthetic air show a closer coupling of the vibrational energies than indicated by adapting earlier experimental results from shock compressions to the nozzle expansion problem. An important difference between the shock wave and nozzle flow problems is the presence of NO in significant amounts throughout the relaxation in the case of a nozzle flow. This may account for the stronger coupling since NO is well suited to promote vibrational energy exchange. The results of a series of experiments and analysis examining vibrational energy coupling in expansions of admixtures approximating air are reported. N2 and O2 vibrational populations are determined by a single-pulse spontaneous Raman scattering technique. NO vibrational populations are determined by broadband absorption by the NO(y) system. The resulting data permit the role of NO in promoting vibrational energy coupling to be better understood, and are used to evaluate models of vibrational energy exchange for application to expanding flows.

Gilmore, John O.↗
NASA NTRS1994

Measured and calculated spectral radiation from a blunt body shock layer in an arc-jet wind tunnel

Spectra of the shock layer radiation incident on the stagnation point of a blunt body placed in an arc-jet wind tunnel were measured over the wavelength range from 600 nm to 880 nm. The test gas was a mixture of 80 percent air and 20 percent argon by mass, and the run was made in a highly nonequilibrium environment. The observed spectra contained contributions from atomic lines of nitrogen, oxygen, and argon, of bound-free and free-free continua, and band systems of N2 and N2(+). The measured spectra were compared with the synthetic spectra, which were obtained through four steps: the calculation of the arc-heater characteristics, of the nozzle flow, of the blunt-body flow, and the nonequilibrium radiation processes. The results show that the atomic lines are predicted approximately correctly, but all other sources are underpredicted by orders of magnitude. A possible explanation for the discrepancy is presented.

Babikian, Dikran S.↗
NASA NTRS1994

Line Profile Measurements of Atomic Oxygen at 1300 A with a VUV Raman Shifter

We are currently developing an atomic oxygen diagnostic to study the degree of oxygen dissociation in ground-based facilities. The absorption of the (sub 3)P - (sup 3)S(sup 0) resonance triplet in the vacuum ultraviolet is a direct measure of the ground state number density of atomic oxygen. Although the integrated line strength is well known for these transitions, the line profile is not. We report the results of a series of experiments in which the line profile is measured in shock-heated oxygen. An ArF excimer laser and a hydrogen Raman shifter generate tunable VUV radiation at the resonance wavelength. The test gas is dissociated oxygen, generated in the Electric Arc Shock Tube (EAST) Facility at NASA-Ames Research Center. By measuring the absorption of known concentrations of atomic oxygen, we are able to study the absorption line profile. The results will serve as a calibration to apply this diagnostic in other flowfields.

Sharma, Surendra P.↗
NASA NTRS1993

Raman scattering measurements of vibrational and rotational distributions in expanding nitrogen

Vibrational and rotational population distributions in expanding nitrogen in the supersonic nozzle of a reflected shock tunnel were investigated using spontaneous Raman scattering spectroscopy. The experimental data are compared with two multitemperature nonequilibrium calculations, one based on the Landau-Teller model for vibrational relaxation, the other on the solution of the vibrational master equations. Good agreement was found between both the Landau-Teller and the master equation solutions for the vibrational energy mode, but the experimentally inferred rotational temperatures were found to be systematically low, due to collisional narrowing. The dramatic increase in vibrational relaxation rates for a cooling flowfield reported in most previous studies was not reproduced by the present experiments.

Gillespie, Walter D.↗
NASA NTRS1993

Time-dependent simulation of reflected-shock/boundary layer interaction

An initial numerical/experimental investigation has been done to better understand multi-dimensional flow phenomena inside pulse facilities. Time-dependent quasi-one-dimensional and axisymmetric numerical simulations of complete shock tube flow are compared with experimental pressure traces recorded at the NASA Ames electric-arc driven shock tube facility (from cold driver shots). Of particular interest is the interaction between the reflected shock wave and the boundary layer. Evidence of the shock bifurcation caused by this interaction is clearly seen in the present experimental data. The axisymmetric simulations reproduce this phenomenon and demonstrate how this interaction can provide a mechanism for driver gas to contaminate the stagnation region. The simulations incorporate finite-rate chemistry, a moving mesh and laminar viscosity.

Wilson, Gregory J.↗
NASA NTRS1992

Nonequilibrium vibrational population measurements in an expanding flow using spontaneous Raman scattering

Vibrational relaxation of nitrogen in a 2D nozzle flow is studied using spontaneous Raman scattering. An electric arc driven shock tube operating as a reflected shock tunnel produces stagnation conditions of 5600 K and 100 atm. A 248 nm KrF laser pulse is focused into the nozzle to produce spatially resolved spontaneous Raman spectra. Vibrational population distributions are derived from the spectra for the states v = 0 to v = 8. The experimental results are compared with two theoretical models: the Landau-Teller relaxation model and a numerical solution of the master equations using transition rates derived from SSH theory. The Landau-Teller correction factor has been measured at 1.0 - 1.5.

Sharma, Surendra P.↗
NASA NTRS1992

NASA Ames's electric arc-driven shock tube facility and research on nonequilibrium phenomena in low density hypersonic flows

Basic requirements for a ground test facility simulating low density hypersonic flows are discussed. Such facilities should be able to produce shock velocities in the range of 10-17 km/sec in an initial pressure of 0.010 to 0.050 Torr. The facility should be equipped with diagnostics systems to be able to measure the emitted radiation, characteristic temperatures and populations in various energy levels. In the light of these requirements, NASA Ames's electric arc-driven low density shock tube facility is described and available experimental diagnostics systems and computational tools are discussed.

Sharma, Surendra P.↗