Metallization systems for semiconductor devices
Metals and systems for semiconductor devices metallization, evaluating conductivity, adhesion, contact resistance, deposition ease, electrochemical corrosion, reliability and stability
Terry, L. E.↗
Engineering topics
Terry, L. E.
Publications and source records attributed to Terry, L. E..
Metallization systems for integrated circuits
Metallization systems materials for IC, discussing environmental stability, metals electromigration, electrochemical corrosion tests, etc
Terry, L. E.↗
Metallization systems for silicon integrated circuits.
Si integrated circuits single and composite layered metallization systems, comparing characteristics of various refractory and noble metals
Terry, L. E.↗