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Trumper, David L.

Publications and source records attributed to Trumper, David L..

7 records
All sourcesNASA NTRSDOE OSTI
NASA NTRS1996

Precision Magnetic Bearing Six Degree of Freedom Stage

Magnetic bearings are capable of applying force and torque to a suspended object without rigidly constraining any degrees of freedom. Additionally, the resolution of magnetic bearings is limited only by sensors and control, and not by the finish of a bearing surface. For these reasons, magnetic bearings appear to be ideal for precision wafer positioning in lithography systems. To demonstrate this capability a linear magnetic bearing has been constructed which uses variable reluctance actuators to control the motion of a 14.5 kg suspended platen in five degrees of freedom. A Lorentz type linear motor of our own design and construction is used to provide motion and position control in the sixth degree of freedom. The stage performance results verify that the positioning requirements of photolithography can be met with a system of this type. This paper describes the design, control, and performance of the linear magnetic bearing.

Williams, M. E.↗
NASA NTRS1996

Feedback Linearization in a Six Degree-of-Freedom MAG-LEV Stage

A six degree-of-freedom electromagnetically suspended motion control stage (the Angstrom Stage) has been designed and constructed for use in short-travel, high-resolution motion control applications. It achieves better than 0.5 nm resolution over a 100 micron range of travel. The stage consists of a single moving element (the platen) floating in an oil filled chamber. The oil is crucial to the stage's operation since it forms squeeze film dampers between the platen and the frame. Twelve electromagnetic actuators provide the forces necessary to suspend and servo the platen, and six capacitance probes measure its position relative to the frame. The system is controlled using a digital signal processing board residing in a '486 based PC. This digital controller implements a feedback linearization algorithm in real-time to account for nonlinearities in both the magnetic actuators and the fluid film dampers. The feedback linearization technique reduces a highly nonlinear plant with coupling between the degrees of freedom into one that is linear, decoupled, and setpoint independent. The key to this procedure is a detailed plant model. The operation of the feedback linearization procedure is transparent to the outer loop of the controller, and so a proportional controller is sufficient for normal operation. We envision applications of this stage in scanned probe microscopy and for integrated circuit measurement.

Ludwick, Stephen J.↗
NASA NTRS1992

Precision magnetic suspension linear bearing

We have shown the design and analyzed the electromechanics of a linear motor suitable for independently controlling two suspension degrees of freedom. This motor, at least on paper, meets the requirements for driving an X-Y stage of 10 Kg mass with about 4 m/sq sec acceleration, with travel of several hundred millimeters in X and Y, and with reasonable power dissipation. A conceptual design for such a stage is presented. The theoretical feasibility of linear and planar bearings using single or multiple magnetic suspension linear motors is demonstrated.

Trumper, David L.↗
NASA NTRS1992

Experimental results in nonlinear compensation of a one degree-of-freedom magnetic suspension

Nonlinear control techniques are of increasing interest in magnetic bearing applications. A one-degree-of-freedom magnetic suspension system has been constructed to serve as a test system for nonlinear control. The objective of this effort is to build an accurate model for the nonlinear suspension dynamics and to show the advantages of compensating for these nonlinearities by using a nonlinear controller. The results obtained with a nonlinear controller are experimentally demonstrated as superior to those obtained with a linear controller. Specifically, a controller which contains a force-control block yields transient responses which are largely independent of the operating point air gap.

Trumper, David L.↗
NASA NTRS1991

Five degree-of-freedom control of an ultra-precision magnetically-suspended linear bearing

The authors constructed a high precision linear bearing. A 10.7 kg platen measuring 125 mm by 125 mm by 350 mm is suspended and controlled in five degrees of freedom by seven electromagnets. The position of the platen is measured by five capacitive probes which have nanometer resolution. The suspension acts as a linear bearing, allowing linear travel of 50 mm in the sixth degree of freedom. In the laboratory, this bearing system has demonstrated position stability of 5 nm peak-to-peak. This is believed to be the highest position stability yet demonstrated in a magnetic suspension system. Performance at this level confirms that magnetic suspensions can address motion control requirements at the nanometer level. The experimental effort associated with this linear bearing system is described. Major topics are the development of models for the suspension, implementation of control algorithms, and measurement of the actual bearing performance. Suggestions for the future improvement of the bearing system are given.

Trumper, David L.↗
NASA NTRS1991

Nonlinear compensation techniques for magnetic suspension systems

In aerospace applications, magnetic suspension systems may be required to operate over large variations in air-gap. Thus the nonlinearities inherent in most types of suspensions have a significant effect. Specifically, large variations in operating point may make it difficult to design a linear controller which gives satisfactory stability and performance over a large range of operating points. One way to address this problem is through the use of nonlinear compensation techniques such as feedback linearization. Nonlinear compensators have received limited attention in the magnetic suspension literature. In recent years, progress has been made in the theory of nonlinear control systems, and in the sub-area of feedback linearization. The idea is demonstrated of feedback linearization using a second order suspension system. In the context of the second order suspension, sampling rate issues in the implementation of feedback linearization are examined through simulation.

Trumper, David L.↗