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VanderWal, Randy

Publications and source records attributed to VanderWal, Randy.

Micro/Nanoscale Chemicalsensor Systems for Aerospace Applications

The aerospace industry requires development of a range of chemical-sensor technologies for applications including emissions monitoring as well as fuel-leak and fire detection. Improvements in sensing technology are necessary to increase safety, reduce emissions, and increase performance. The overall aim is to develop intelligent-vehicle systems that can autonomously monitor their state and respond to environmental changes. A range of chemical sensors is under development to meet these needs, based in part on microfabrication technology which produces sensors of minimal size, weight, and power consumption. We have fabricated a range of sensor platforms, integrated them with hardware to form complete sensor systems, and demonstrated their applicability.

Hunter, Gary↗

Microchemical and Gaseous Sensors Using Carbon Nanotubes and MEMS Fabrication Technology

The objective of this research is to use a combination of carbon nanotubes and silicon-based microfabrication and micromachining processes to produce unique micro-sized chemical and gaseous sensors. Polished quartz substrate is used. Interdigitated structure is used for the sensing elements. Metallic catalysts for the growth of the carbon nanotube include copper, iron, nickel, and cobalt. Various thicknesses of the metallic catalysts are used in this study varying between 5 to 20 microns. Depositing of the metallic catalyst is accomplished using an ion-beam sputtering thin film technique and a shadow mask. Single wall carbon nanotubes are successfully formed over the metallic catalyst layer. Preliminary measurements of the carbon nanotubes show this nanotube contained film over the sensing elements which had a resistance value of 400 ohms at room temperature. This is a more conductive film comparing to metal oxide films, such as SnO2 or ZnO, that are now widely used in gaseous sensor research. Evaluation of the carbon nanotube film for potential gaseous sensing will be carried out.

Liu, Chung-Chiun↗