Characterizations of Optimized Microshutter Arrays for Space Borne Observatory Applications
We report the latest design, fabrication, and characterization result of the Next-Generation Microshutter Arrays (NGMSA) for space borne observatory applications. Our improved blade design aims to reduce the counter torque induced by the potential on the opposing wall to eliminate the torque bump, and thus enables pure electrostatic actuation for more reliable and stable microshutter operations. This paper presents the experimental performances of micro-fabricated microshutter arrays with varying design parameters and compares the results with simulation predictions.