Optical metrology and fabrication for synchrotron x-ray optics at NSLS-II
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36 MATERIALS SCIENCE↗
Engineering topics
Wang, Tianyi
Publications and source records attributed to Wang, Tianyi.
Simulation Study of High-Precision Characterization of MeV Electron Interactions for Advanced Nano-Imaging of Thick Biological Samples and Microchips
The resolution of a mega-electron-volt scanning transmission electron microscope (MeV-STEM) is primarily governed by the properties of the incident electron beam and angular broadening effects that occur within thick biological samples and microchips. A precise understanding and mitigation of these constraints require detailed knowledge of beam emittance, aberrations in the STEM column optics, and energy-dependent elastic and inelastic critical angles of the materials being examined. This simulation study proposes a standardized experimental framework for comprehensively assessing beam intensity, divergence, and size at the sample exit. This framework aims to characterize electron-sample interactions, reconcile discrepancies among analytical models, and validate Monte Carlo (MC) simulations for enhanced predictive accuracy. Our numerical findings demonstrate that precise measurements of these parameters, especially angular broadening, are not only feasible but also essential for optimizing imaging resolution in thick biological samples and microchips. By utilizing an electron source with minimal emittance and tailored beam characteristics, along with amorphous ice and silicon samples as biological proxies and microchip materials, this research seeks to optimize electron beam energy by focusing on parameters to improve the resolution in MeV-STEM/TEM. This optimization is particularly crucial for in situ imaging of thick biological samples and for examining microchip defects with nanometer resolutions. Our ultimate goal is to develop a comprehensive mapping of the minimum electron energy required to achieve a nanoscale resolution, taking into account variations in sample thickness, composition, and imaging mode.
36 MATERIALS SCIENCE↗
Key aspects of sub-nanometer deterministic ion beam figuring for synchrotron hard x-ray mirror fabrication
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36 MATERIALS SCIENCE↗
Post-production correction of lamellar x-ray gratings by ion beam figuring
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36 MATERIALS SCIENCE↗
A comprehensive review of dwell time optimization methods in computer-controlled optical surfacing
Dwell time plays a vital role in determining the accuracy and convergence of the computer-controlled optical surfacing process. However, optimizing dwell time presents a challenge due to its ill-posed nature, resulting in non-unique solutions. To address this issue, several well-known methods have emerged, including the iterative, Bayesian, Fourier transform, and matrix-form methods. Despite their independent development, these methods share common objectives, such as minimizing residual errors, ensuring dwell time's positivity and smoothness, minimizing total processing time, and enabling flexible dwell positions. This paper aims to comprehensively review the existing dwell time optimization methods, explore their interrelationships, provide insights for their effective implementations, evaluate their performances, and ultimately propose a unified dwell time optimization methodology.
36 MATERIALS SCIENCE↗
Two-step retrace error calibration removing tilt ambiguity in coherence scanning interferometry
In interferometry measurement, the retrace error often limits its high-precision metrology applications. Retrace error calibration with tilted flats can give a relation between the retrace error and the introduced tilt angles, but there is still an ambiguity between the introduced tilt angles and the tilt terms in the created retrace error. Here, we propose a novel, to the best of our knowledge, two-step calibration method to resolve this tilt ambiguity. It involves additional measurements of spherical mirror(s) with known curvature(s). The experiment shows that the curvature deviation due to the tilt ambiguity can be significantly reduced after applying the proposed method.
36 MATERIALS SCIENCE↗
Collimated phase measuring deflectometry
Phase measuring deflectometry has been applied for free-form specular surface metrology, but its measured slope results are sensitive to the depth of sample positioning, which is also called the height-slope ambiguity. The objective of this work is to tackle this height-slope ambiguity problem. The main idea is to introduce collimated camera rays using a telecentric imaging lens and collimated structured-light illumination with a Fourier lens. This setup makes the fringe phases become only sensitive to the surface slopes and insensitive to the depth of the sample positioning. In this way, the slope calculation is theoretically independent of the sample depth. We call this new deflectometry technique Collimated Phase Measuring Deflectometry (CPMD). With our developed CPMD experimental setup, the measurement is insensitive to the depth of sample positioning, e.g., the measured height dispersion is less than 30 nm RMS within a 10 mm depth range when measuring a 50-mm-diameter spherical mirror with a 200 mm radius of curvature. In conclusion, the merits and limitations of the proposed CPMD technique are discussed, revealing its prospects in practical metrology applications and potential future investigations.
36 MATERIALS SCIENCE↗
Energy gap of topological surface states in proximity to a magnetic insulator
Abstract Topological surface-states can acquire an energy gap when time-reversal symmetry is broken by interfacing with a magnetic insulator. This gap has yet to be measured. Such topological-magnetic insulator heterostructures can host a quantized anomalous Hall effect and can allow the control of the magnetic state of the insulator in a spintronic device. In this work, we observe the energy gap of topological surface-states in proximity to a magnetic insulator using magnetooptical Landau level spectroscopy. We measure Pb 1-x Sn x Se–EuSe heterostructures grown by molecular beam epitaxy exhibiting a record mobility and low Fermi energy. Through temperature dependent measurements and theoretical calculations, we show this gap is likely due to quantum confinement and conclude that the magnetic proximity effect is weak in this system. This weakness is disadvantageous for the realization of the quantum anomalous Hall effect, but favorable for spintronic devices which require the preservation of spin-momentum locking at the Fermi level.
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗
Statistical Tool Size Study for Computer-Controlled Optical Surfacing
Over the past few decades, computer-controlled optical surfacing (CCOS) systems have become more deterministic. A target surface profile can be predictably achieved with a combination of tools of different sizes. However, deciding the optimal set of tool sizes that will achieve the target residual error in the shortest run time is difficult, and no general guidance has been proposed in the literature. In this paper, we present a computer-assisted study on choosing the proper tool size for a given surface error map. First, we propose that the characteristic frequency ratio (CFR) can be used as a general measure of the correction capability of a tool over a surface map. Second, the performance of different CFRs is quantitatively studied with a computer simulation by applying them to guide the tool size selection for polishing a large number of randomly generated surface maps with similar initial spatial frequencies and root mean square errors. Finally, we find that CFR = 0.75 achieves the most stable trade-off between the total run time and the number of iterations and thus can be used as a general criterion in tool size selection for CCOS processes. To the best of our knowledge, the CFR is the first criterion that ties tool size selection to overall efficiency.
36 MATERIALS SCIENCE↗
Computer-controlled finishing via dynamically constraint position-velocity-time scheduler
In a Computer Numerical Controlled (CNC) finishing process, the target material removal from an optical surface is guided by the convolution between the influence function of a machine tool and its dwell time at certain points over the surface. To reduce dynamics stressing and increase machining efficiency, the dwell time must be converted to varying velocities, which are the actual inputs to the machine tool controller. Conventionally, the conversion assumed constant acceleration and relied on linear motion interpolation, which caused discontinuities in velocities. This unsmooth motion affects the material removal distribution, and, thus, the accuracy of the finished surface shape. Many modern CNC machines support the smoother, cubic-polynomial interpolated Position-Velocity-Time (PVT) motion mode; however, the conventional scheduler may fail to provide suitable velocities for the PVT. Here in this study answers this challenge by proposing a novel PVT-based velocity scheduler that achieves smooth motion while considering CNC dynamic limits. Firstly, the principle of the PVT is explained, and the PVT-based velocity scheduler is formulated. Secondly, a quadratic programming is used to optimize the velocities by imposing the CNC dynamic constraints and the C 1 continuities (zeroth and first derivatives are continuous) simultaneously. Thirdly, the smoothness and accuracy of the scheduled velocities are studied on different kinds of tool paths via simulation. Finally, a sub-0.3 nm level surface finishing experiment using ion beam figuring is demonstrated to verify the feasibility of the proposed method. The PVT-based scheduler and simulator code is open-sourced.
36 MATERIALS SCIENCE↗
Multi-pitch nano-accuracy surface profiler for strongly curved X-ray mirror metrology
We present our recent research and development effort on the Multi-Pitch Nano-accuracy Surface Profiler (MPNSP). This metrology instrument is developed to characterize strongly curved X-ray mirrors proposed to achieve diffraction-limited soft X-ray focusing for scientific applications at the synchrotron beamlines. The measurement process consists of forward-and-backward scans on the test mirror surface along its tangential direction at multiple pitch angles. Our research and development in this work aim to take the challenge of measuring strongly curved X-ray mirrors with a typical total slope range ≳10 mrad, while maintaining the Root Mean Square (RMS) value of measurement repeatability and self-consistency at 50 nrad RMS level. We first introduce the mechanical design, followed by a brief review of the mathematical model and the optimization algorithm for the MPNSP technique. By detecting the rotation axis of the mirror pitch with a machine vision approach, we can determine and then reduce the vertical distance between the pitch rotation axis and the test mirror surface to a sub-mm level. In addition, we describe a practical data acquisition procedure for strongly curved X-ray mirrors with a total slope range larger than the slope measuring range of the autocollimator used in the instrument. As a result, the proposed MPNSP measurements with different mirror orientations achieve remarkable self-consistency and reproducibility of < 50 nrad RMS in slope and < 0.5 nm RMS in height.
42 ENGINEERING↗
Effect of the Binder during Ultra-Precision Polishing of Tungsten Carbide Using a Semirigid Bonnet Tool
Tungsten carbide (WC) has the characteristics of high hardness, high strength, corrosion resistance, wear resistance and excellent fracture toughness. Accordingly, it has been commonly used as the material for cutting tools and molds in glass-forming techniques. To obtain ultra-smooth surfaces, fine polishing of WC is indispensable. However, the efficiency of WC polishing is low using the existing polishing methods, and the mechanism behind the polishing process requires further investigation. Specifically, the effect of the binder in WC polishing is not clear since there are different kinds of WC with various weight percentages of the binder. In this paper, we present the findings of a study on the polishing performance of two kinds of WC material, with and without the binder, using a semi-rigid (SR) bonnet polishing tool. A series of experiments were performed on a 6-DOF robotic polishing instrument to investigate the material-removal characteristics, surface integrity and sub-surface damage after polishing. The results demonstrate that the SR bonnet polishing tool successfully reduced the surface roughness of WC with and without the binder to the nanometric level, though the lowest surface roughness was obtained on binder-less WC. No obvious sub-surface damage was observed under SEM inspection, while the processing efficiency was greatly improved owing to the high material removal rate of the tool. Based on our analysis of key polishing parameters and corresponding surface integrities, the effect of the binder on the polishing performance is explained, which offers excellent guidance for WC polishing.
ultra-precision machining↗
Review on robot-assisted polishing: Status and future trends
Nowadays, precision components have been extensively used in various industries such as biomedicine, photonics, and optics. To achieve nanometric surface roughness, high-precision polishing is mandatory. Compared with the conventional polishing techniques, the robot-assisted polishing has the advantages of flexible working ranges and low cost. Therefore, it has been more widely deployed in demanding polishing tasks. However, few review articles were found on this topic to provide a general progress on the development of the robot-assisted polishing technology. Here in this paper reviews the recent advancement of the robot-assisted polishing. Firstly, the integration of robots with various polishing techniques is overviewed, followed by the introduction of the research status of constant force control in robot-assisted polishing. Then, the errors in typical robot-assisted polishing systems are analyzed, together with the corresponding compensation methods. At last, the future trends in the development of robot-assisted polishing are discussed. This review is intended as a roadmap for researchers or engineers who are interested in robot-assisted polishing or machining.
36 MATERIALS SCIENCE↗
Random adaptive tool path for zonal optics fabrication
Deterministic optics fabrication using sub-aperture tools has been vital for manufacturing precision optical surfaces. The fabrication process requires the tool influence function and the tool path to calculate the dwell time that guides the tool to bring surface quality within tight design tolerances. Widely used spiral and raster paths may leave excess waviness from the tool path, and the unavoidable constant removal layer is added to obtain positive dwell time. This waviness can be removed by either using smaller tools sequentially or randomizing the tool path. However, the existing tool-path solutions can hardly adapt to different surface aperture shapes and localized surface errors. Process efficiency and accuracy are also not well considered in tool-path planning. We propose an innovative zonal Random Adaptive Path (RAP) to solve these problems in this study. Firstly, RAP can be flexibly adapted to different surface aperture shapes by introducing part boundary. Secondly, an average threshold strategy is used in the RAP planning to improve efficiency, enabling the surface errors to be selectively corrected. Finally, the threshold is performed in several passes within one processing cycle, each with its RAP, until the desired residual is achieved. The performance of the proposed RAP is studied by comparing it with the conventional tool paths. The results demonstrated that RAP takes the least processing time and achieves the best surface quality, which verifies the effectiveness of RAP in deterministic optics fabrication.
36 MATERIALS SCIENCE↗
Generalized large optics fabrication multiplexing
High precision astronomical optics are manufactured through deterministic computer controlled optical surfacing processes, such as subaperture small tool polishing, magnetorheological finishing, bonnet tool polishing, and ion beam figuring. Due to the small tool size and the corresponding tool influence function, large optics fabrication is a highly time-consuming process. The framework of multiplexed figuring runs for the simultaneous use of two or more tools is presented. This multiplexing process increases the manufacturing efficiency and reduces the overall cost using parallelized subaperture tools.
36 MATERIALS SCIENCE↗
Measurement Uncertainty of Highly Asymmetrically Curved Elliptical Mirrors Using Multi-Pitch Slope Stitching Technique
Soft X-ray off-axis elliptical mirrors bring new challenges for X-ray mirror metrology. These highly asymmetrically curved elliptical cylindrical mirrors with a total slope range >10 mrad are extremely challenging to measure. Their total slope range exceeds the measuring range of most angular sensors used for X-ray mirror inspection. To overcome this problem, it is possible to stitch partial slope data by measuring the mirror at different pitch angles (multi-pitch angles). By revisiting the theory of the multi-pitch Nano-accuracy Surface Profiler (NSP), we derive the sampling position error on the mirror surface as a function of the mirror height profile and the measurement error of the pitch rotation center. When measuring “extreme”, highly asymmetrically curved, elliptical mirrors, the calculation of the mirror height profile with iterative reconstruction outperforms the classical “flat assumption” (i.e., assuming that the mirror sag is negligible). As demonstrated by our simulations, a proper tolerance evaluation on the measurement of pitch rotation center is needed to assess the measurement accuracy (systematic error) for these strongly aspherical mirrors using the multi-pitch NSP technique. Taking a real design of an “extreme” elliptical mirror as a case study, we conduct a Monte Carlo simulation to mimic the measurement and characterization process to analyze the impact of several error sources. With the measurement uncertainty of the pitch rotation center, the multi-pitch NSP measurement can estimate the grazing angle θ and the chief ray location x o with their uncertainties, as well as the slope residuals.
36 MATERIALS SCIENCE↗
Compact instantaneous phase-shifting Sagnac interferometer for nanoscale tilt measurement
There is a large inter disciplinary need for high precision angular sensors in state-of-the-art technologies. This particularly applies to optical metrology in the field of Extreme Ultraviolet (EUV) or X-ray where the optics are commonly characterized in terms of slope errors at a nanoradian scale level. Here, in this paper, we present the in-lab development of an angular sensor based on a single reflection compact Sagnac interferometer using instantaneous phase shifting. Our automated prototype and first results show less than 15 nrad RMS repeatability, at least 200 nrad sensitivity and 280 nrad reproducibility over 100 μrad angular range.
36 MATERIALS SCIENCE↗
Material Removal and Surface Integrity Analysis of Ti6Al4V Alloy after Polishing by Flexible Tools with Different Rigidity
Ti6Al4V alloy has been widely used in many fields, such as aerospace and medicine, due to its excellent biocompatibility and mechanical properties. Most high-performance components made of Ti6Al4V alloy usually need to be polished to produce their specific functional requirements. However, due to the material properties of Ti6Al4V, its polishing process still requires significant development. Therefore, this study aimed to investigate the performance of polishing Ti6Al4V by using tools with different rigidities. Two kinds of bonnet tool were used, namely a pure rubber (PR) bonnet and a semirigid (SR) bonnet. The characterization of material removal and surface integrity after polishing was conducted through a series of experiments on a 6-DOF robotic polishing device. The results demonstrate that both bonnet tools successfully produce nanometric level surface roughness. Moreover, the material removal rate of the SR bonnet tool is significantly higher than that of the PR bonnet, which is consistent with the material removal characteristics of glass polishing in previous research. In addition, the presented analysis on key polishing parameters and surface integrity lays the theoretical foundation for the polishing process of titanium alloy in different application fields.
36 MATERIALS SCIENCE↗