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Youngman, Kevin

Publications and source records attributed to Youngman, Kevin.

6 records
All sourcesNASA NTRSDOE OSTI
DOE OSTI2024

Spatially resolved measurements of electron density of a magnetically confined split-ring resonator source

Laser-collisional induced fluorescence is used to study the plasma generated by a split-ring resonator discharge under an external cusp shaped magnetic field created by permanent magnets. The electron density and electron temperature are measured for a helium plasma at different pressures, powers, and magnet field strengths. It is found that the magnetic fields produce higher electron temperatures with peak temperatures of ∼3 eV, while the no magnet case has peak temperatures of ∼0.8 eV. Conversely, the peak electron density is obtained in the no magnet case at a value of ∼1.9 × 1011 cm−3. This indicates that the cusp-field did magnetize the electrons, but contrary to expectations, it resulted in a decrease in electron density. This is believed to be due to the magnetic field having negative effects on the resonance of the plasma source.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2024

Machine Learning of Plasma Science for Next Generation Microelectronics (Project Final Report)

Low temperature plasmas (LTPs) are an enabling technology behind reducing device dimensions and the continuation of Moore’s Law. It is estimated that 40-45% of all process steps necessary to manufacture semiconductor devices involve LTPs. However, challenges in plasma process design and continuous incorporation of novel materials for new device architectures are pushing the limits of what is possible with current plasma technology. For example, creating higher aspect ratio structures and etching features at the atomic scale both require finer control of the ion energy/velocity at wafer surfaces. To support these types of future innovations in the plasma processing systems that Sandia and the DOE rely upon, we have developed novel diagnostics, simulations, and machine learning capabilities to discover, characterize, and predict plasma phenomena affecting the ion energy/velocity distribution function (IEDF). These efforts also supported research program development and external collaboration with industry and academia through Sandia’s Plasma Research Facility (PRF). This report will focus on the following topics and accomplishments of this three year LDRD project, briefly summarized.

42 ENGINEERING↗