@misc{indiciae41cccb48ece8,
  title = {Impurity diffusion process for silicon semiconductors is fast and precise},
  author = {Mc \textasciitilde{}louski, R. M. and Mc Louski, R. M. and Skouson, G. W.},
  year = {1965},
  url = {https://ntrs.nasa.gov/citations/19650000298},
  note = {Source identifier: 19650000298}
}