@misc{indiciaea2fbff0722f3, title = {Electron microscope method for measuring diffraction grating groove geometry.}, author = {Anderson, W. A. and Griffin, G. L. and Mooney, C. F. and Wiley, R. S.}, year = {1965}, url = {https://ntrs.nasa.gov/citations/19650046822}, note = {Source identifier: 19650046822} }