TY  - RPRT
TI  - Electron microscope method for measuring diffraction grating groove geometry.
AU  - Anderson, W. A.
AU  - Griffin, G. L.
AU  - Mooney, C. F.
AU  - Wiley, R. S.
PY  - 1965
UR  - https://ntrs.nasa.gov/citations/19650046822
ID  - 19650046822
ER  -