@misc{indiciae45c24b1021c0,
  title = {Epitaxial process for development for monolithic complementary MOS-FET structure with oxide barrier isolation Final report, 15 Mar. - 15 Sep. 1965},
  author = {Skouson, G. W.},
  year = {1965},
  url = {https://ntrs.nasa.gov/citations/19660006699},
  note = {Source identifier: 19660006699}
}