TY  - RPRT
TI  - Epitaxial process for development for monolithic complementary MOS-FET structure with oxide barrier isolation Final report, 15 Mar. - 15 Sep. 1965
AU  - Skouson, G. W.
PY  - 1965
UR  - https://ntrs.nasa.gov/citations/19660006699
ID  - 19660006699
ER  -