@misc{indiciaed75c25a28c8a,
  title = {Epitaxial process development for monolithic complementary MOS-FET structures with P-N JUNCTION isolation Final report, 1 Feb. - 15 Jul. 1965},
  author = {Skouson, G. W.},
  year = {1965},
  url = {https://ntrs.nasa.gov/citations/19660006701},
  note = {Source identifier: 19660006701}
}