TY  - RPRT
TI  - Epitaxial process development for monolithic complementary MOS-FET structures with P-N JUNCTION isolation Final report, 1 Feb. - 15 Jul. 1965
AU  - Skouson, G. W.
PY  - 1965
UR  - https://ntrs.nasa.gov/citations/19660006701
ID  - 19660006701
ER  -