@misc{indiciae787f2fdbf9f3,
  title = {Sputtering ion source Final report, 29 Mar. - 30 Sep. 1963},
  author = {Herzog, R. F. K. and Liebl, H. J.},
  year = {1963},
  url = {https://ntrs.nasa.gov/citations/19660015116},
  note = {Source identifier: 19660015116}
}