@misc{indiciaed5fca6285053,
  title = {Process controls introduction of selected impurities into semiconductor wafers},
  author = {Bartholomay, W. C. and Topfer, A. R.},
  year = {1967},
  url = {https://ntrs.nasa.gov/citations/19670000303},
  note = {Source identifier: 19670000303}
}