@misc{indiciaea9ea0f27353a,
  title = {Electron microprobe techniques for failure analysis of silicon planar devices.},
  author = {Cline, J. E. and Schwartz, S.},
  year = {1968},
  url = {https://ntrs.nasa.gov/citations/19680046276},
  note = {Source identifier: 19680046276}
}